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公开(公告)号：US12209975B2
公开(公告)日：2025-01-28
申请号：US17883678
申请日：2022-08-09
Applicant: Intel Corporation
Inventor： John Ferdinand Magana , Guojing Zhang
IPC: G01N21/958
Abstract: The present disclosure is directed to a reticle assembly having a reticle and a pellicle attached to a pellicle support frame positioned on the reticle and includes a sensor assembly having optical and sensor components, which monitor the pellicle. The optical components and the sensor components of the sensor assembly may be coupled to a controller, which may be further coupled to one or more semiconductor process tools.
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