公开(公告)号：US20240319437A1

公开(公告)日：2024-09-26

申请号：US18189844

申请日：2023-03-24

Applicant: Intel Corporation

Inventor： Xiaoqian Li ,  Omkar G. Karhade ,  Nitin A. Deshpande ,  Julia Chiu ,  Chia-Pin Chiu ,  Kaveh Hosseini ,  Madhubanti Chatterjee

IPC: G02B6/12 ,  G02B6/136

CPC classification number: G02B6/12002 ,  G02B6/136

Abstract: A photonic integrated circuit (PIC), a semiconductor assembly including the PIC, a multi-chip package including the PIC, and a method of forming the PIC. The PIC includes a PIC substrate, and a semiconductor layer on a top surface of the PIC substrate and including a semiconductor material and an optical component. The PIC substrate defines an air cavity therein extending in a direction from a bottom surface of the PIC substrate toward and in registration with the optical component. The semiconductor layer is free of any opening therethrough in communication with the air cavity.