公开(公告)号：US20200015061A1

公开(公告)日：2020-01-09

申请号：US16489357

申请日：2018-03-14

Applicant: Intel Corporation

Inventor： Ashish Singh ,  Sushant Kumar ,  Prasad Ashtekar

IPC: H04W4/90 ,  H04W76/50 ,  H04W4/029

Abstract: In accordance with various embodiments, an electron beam evaporator can comprise the following: a tubular target; an electron beam gun for producing at least one vapor source on a removal surface of the tubular target by means of an electron beam; wherein the removal surface is a ring-shaped axial end surface or a surface of the tubular target that extends conically or in a curved fashion from the free end edge.

公开(公告)号：US10932115B2

公开(公告)日：2021-02-23

申请号：US16489357

申请日：2018-03-14

Applicant: Intel Corporation

Inventor： Ashish Singh ,  Sushant Kumar ,  Prasad Ashtekar

IPC: H04B17/336 ,  H04W4/90 ,  H04W4/029 ,  H04W76/50 ,  H04B7/0413 ,  H04B7/06 ,  H04J3/16 ,  H04J11/00 ,  H04L5/00 ,  H04L29/08 ,  H04W76/27 ,  H04B7/0456 ,  H04W84/04

Abstract: In accordance with various embodiments, an electron beam evaporator can comprise the following: a tubular target; an electron beam gun for producing at least one vapor source on a removal surface of the tubular target by means of an electron beam; wherein the removal surface is a ring-shaped axial end surface or a surface of the tubular target that extends conically or in a curved fashion from the free end edge.