公开(公告)号：US20240175917A1

公开(公告)日：2024-05-30

申请号：US18071399

申请日：2022-11-29

Applicant: Intel Corporation

Inventor： Ruben NUNEZ BLANCO ,  Christopher ACKERMAN ,  Paul DIGLIO ,  Varun NARAYAN ,  Craig YOST ,  Jensen STENBERG ,  Kelly LOFGREEN ,  Joseph PETRINI ,  Sami ALELYANI

IPC: G01R31/28 ,  H01L23/467

CPC classification number: G01R31/2877 ,  G01R31/2863 ,  H01L23/467

Abstract: This disclosure describes systems, methods, and devices related to preventing water leakage from jet impingement applied to an integrated circuit under test. An integrated circuit testing apparatus for applying jet impingement to an integrated circuit may include an impingement chamber in contact with an integrated circuit being tested, the impingement chamber comprising water associated with cooling the integrated circuit; and an actuator-driven thermal management block including an air inlet configured to direct a flow of air into an immediate test environment for the integrated circuit to generate a positive pressure differential with respect to the water in the impingement chamber to prevent leakage of the water from the impingement chamber.