公开(公告)号：US09778042B2

公开(公告)日：2017-10-03

申请号：US14106158

申请日：2013-12-13

Applicant: Intel Corporation

Inventor： Suraj Bramhavar ,  David N. Hutchison ,  John Heck

IPC: G01P15/13 ,  G01C19/72 ,  G01C19/56 ,  G01P15/093 ,  G01C19/5719 ,  G01D5/353 ,  G02B6/42 ,  G01P15/08

CPC classification number: G01C19/722 ,  G01C19/56 ,  G01C19/5719 ,  G01D5/35374 ,  G01P15/093 ,  G01P2015/084 ,  G02B6/4225

Abstract: Embodiments of the present disclosure are directed towards a micro-electromechanical system (MEMS) sensing apparatus, including a laser arrangement configured to generate a light beam, a first waveguide configured to receive and output the light beam, and a second waveguide aligned endface to endface with the first waveguide. The second waveguide may be configured to receive at least a portion of the light beam from the first waveguide via optical coupling through the aligned endfaces. Either the first or second waveguide may be configured to be moveable in response to an inertial change of the apparatus, wherein movement of the first or second waveguide causes a corresponding change in light intensity of the portion of the light beam, the change in light intensity indicating a measure of the inertial change. Other embodiments may be described and/or claimed.

公开(公告)号：US20160195397A1

公开(公告)日：2016-07-07

申请号：US14106158

申请日：2013-12-13

Applicant: Intel Corporation

Inventor： Suraj Bramhavar ,  David N. Hutchison ,  John Heck

IPC: G01C19/72 ,  G01C19/56 ,  G01D5/353

CPC classification number: G01C19/722 ,  G01C19/56 ,  G01C19/5719 ,  G01D5/35374 ,  G01P15/093 ,  G01P2015/084 ,  G02B6/4225

Abstract: Embodiments of the present disclosure are directed towards a micro-electromechanical system (MEMS) sensing apparatus, including a laser arrangement configured to generate a light beam, a first waveguide configured to receive and output the light beam, and a second waveguide aligned endface to endface with the first waveguide. The second waveguide may be configured to receive at least a portion of the light beam from the first waveguide via optical coupling through the aligned endfaces. Either the first or second waveguide may be configured to be moveable in response to an inertial change of the apparatus, wherein movement of the first or second waveguide causes a corresponding change in light intensity of the portion of the light beam, the change in light intensity indicating a measure of the inertial change. Other embodiments may be described and/or claimed.

Abstract translation: 本公开的实施例涉及一种微机电系统（MEMS）感测装置，其包括被配置为产生光束的激光装置，被配置为接收和输出光束的第一波导，以及将端面与端面对准的第二波导 与第一波导。 第二波导可以被配置为通过经由对准的端面的光耦合来接收来自第一波导的光束的至少一部分。 第一或第二波导可以被配置为响应于设备的惯性变化而可移动，其中第一或第二波导的移动导致光束部分的光强度的相应变化，光强度的变化 表明惯性变化的度量。 可以描述和/或要求保护其他实施例。