公开(公告)号：US20170176173A1

公开(公告)日：2017-06-22

申请号：US14973131

申请日：2015-12-17

Applicant: Intel Corporation

Inventor： Yanmei Song ,  Yongmei Liu ,  Deepak Goyal ,  Donglai David Lu ,  Marcel A. Wall

IPC: G01B11/06

CPC classification number: G01B11/065

Abstract: Described herein are devices and techniques for measuring a thickness of a surface layer. A device can include a detector, a processor, and a memory. The detector can be arranged to receive reflected light from a surface of a sample. The processor can be in electrical communication with the detector. The memory can store instructions that, when executed by the processor, can cause the processor to perform operations. The operations can include receiving optical data from the detector, determining a polarization change of the reflected light, the polarization change being a function of the optical data, and determining a thickness of the surface layer using the polarization change and the wavelength of the incident light. The optical data can include information regarding the phase difference of the reflected light and the incident light. Also described are other embodiments.