公开(公告)号：US20140179123A1

公开(公告)日：2014-06-26

申请号：US13722624

申请日：2012-12-20

Applicant: INTERMOLECULAR, INC.

Inventor： Ed Korczynski ,  Dipankar Pramanik

IPC: H01L21/263 ,  H05B6/00

CPC classification number: H05B1/0233 ,  H01L21/2686 ,  H01L21/67115 ,  H01L21/67253

Abstract: Methods and apparatus are described that allow the investigation of process variables used in RTP systems to be varied in a combinatorial manner across a plurality of site-isolated regions designated in the surface of a substrate. The methods and apparatus allow process variables such as power, dwell time, light source, cooling gas composition, cooling gas flow rate, reactive gas composition, reactive gas flow rate, and substrate support temperature and the like to be investigated.

Abstract translation: 描述了允许在RTP系统中使用的过程变量的研究以组合方式跨越在衬底的表面中指定的多个位置隔离区域的方式和装置。 该方法和装置允许研究诸如功率，停留时间，光源，冷却气体组成，冷却气体流速，反应气体组成，反应气体流速和衬底支撑温度等过程变量。

公开(公告)号：US09023739B2

公开(公告)日：2015-05-05

申请号：US13722624

申请日：2012-12-20

Applicant: Intermolecular, Inc.

Inventor： Ed Korczynski ,  Dipankar Pramanik

IPC: H01L21/26 ,  H05B1/02 ,  H01L21/268 ,  H01L21/67

CPC classification number: H05B1/0233 ,  H01L21/2686 ,  H01L21/67115 ,  H01L21/67253

Abstract: Methods and apparatus are described that allow the investigation of process variables used in RTP systems to be varied in a combinatorial manner across a plurality of site-isolated regions designated in the surface of a substrate. The methods and apparatus allow process variables such as power, dwell time, light source, cooling gas composition, cooling gas flow rate, reactive gas composition, reactive gas flow rate, and substrate support temperature and the like to be investigated.

Abstract translation: 描述了允许在RTP系统中使用的过程变量的研究以组合方式跨越在衬底的表面中指定的多个位置隔离区域进行的调查的方法和装置。 该方法和装置允许研究诸如功率，停留时间，光源，冷却气体组成，冷却气体流速，反应气体组成，反应气体流速和衬底支撑温度等过程变量。