公开(公告)号：US20170233868A1

公开(公告)日：2017-08-17

申请号：US15427882

申请日：2017-02-08

Applicant: Intermolecular, Inc.

Inventor： Bernardo Donoso ,  Karl Littau ,  Lawrence D. Bartholomew

IPC: C23C16/455 ,  H01L21/02 ,  C23C16/44

CPC classification number: C23C16/45565 ,  C23C16/4412 ,  C23C16/45544 ,  C23C16/45574

Abstract: Embodiments provided herein describe systems and method for processing substrates. A substrate is provided. A showerhead is positioned above the substrate. The showerhead includes a plurality of injection ports, at least one isolation channel, and at least one exhaust port on a bottom surface thereof. The at least one isolation channel separates the plurality of injection ports into two or more sections. The at least one exhaust port is positioned within the at least one isolation channel. The plurality of injection ports are not in fluid communication with the at least one exhaust port within the showerhead. At least one processing fluid is caused to be delivered from the plurality of injection ports onto the substrate. At least some of the at least one processing fluid is caused to be removed from the substrate through the at least one exhaust port.

公开(公告)号：US10364497B2

公开(公告)日：2019-07-30

申请号：US15427882

申请日：2017-02-08

Applicant: Intermolecular, Inc.

Inventor： Bernardo Donoso ,  Karl Littau ,  Lawrence D. Bartholomew

IPC: C23C16/455 ,  C23C16/44

Abstract: Embodiments provided herein describe systems and method for processing substrates. A substrate is provided. A showerhead is positioned above the substrate. The showerhead includes a plurality of injection ports, at least one isolation channel, and at least one exhaust port on a bottom surface thereof. The at least one isolation channel separates the plurality of injection ports into two or more sections. The at least one exhaust port is positioned within the at least one isolation channel. The plurality of injection ports are not in fluid communication with the at least one exhaust port within the showerhead. At least one processing fluid is caused to be delivered from the plurality of injection ports onto the substrate. At least some of the at least one processing fluid is caused to be removed from the substrate through the at least one exhaust port.