公开(公告)号：US09324767B1

公开(公告)日：2016-04-26

申请号：US14145410

申请日：2013-12-31

Applicant: Intermolecular, Inc.

Inventor： Andrew Steinbach ,  Tony Bonetti ,  Frank Greer ,  Kurt Pang ,  Yun Wang

IPC: H01L29/06 ,  H01L27/18 ,  H01L23/532

CPC classification number: H01L27/18 ,  H01L23/53276 ,  H01L39/223 ,  H01L39/2493 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Provided are superconducting tunnel junctions, such as Josephson tunnel junctions, and a method of fabricating thereof. A junction includes an insulator disposed between two superconductors. The junction may also include one or two interface layers, with each interface layer disposed between the insulator and one of the superconductors. The interface layer is configured to prevent oxygen from entering the adjacent superconductor during fabrication and operation of the junction. Furthermore, the interface layer may protect the insulator from the environment during handling and processing of the junction, thereby allowing vacuum breaks after the interface layer is formed as well as new integration schemes, such as depositing a dielectric layer and forming a trench in the dielectric layer for the second superconductor. In some embodiments, the junction may be annealed during its fabrication to move oxygen from the superconductors and/or from the insulator into the one or two interface layers.

Abstract translation: 提供了超导隧道结，例如约瑟夫逊隧道结，及其制造方法。 接合部包括设置在两个超导体之间的绝缘体。 接合部还可以包括一个或两个界面层，每个界面层设置在绝缘体和超导体之一之间。 接口层被配置为在结的制造和操作期间防止氧气进入相邻的超导体。 此外，接口层可以在接合处理和处理期间保护绝缘体免受环境影响，从而在形成界面层之后允许真空断裂以及新的集成方案，例如沉积电介质层并在电介质中形成沟槽 第二超导体层。 在一些实施例中，接头可以在其制造期间被退火以将氧从超导体和/或从绝缘体移动到一个或两个界面层中。