公开(公告)号：US08772124B2

公开(公告)日：2014-07-08

申请号：US13738826

申请日：2013-01-10

Applicant: Intermolecular Inc.

Inventor： Rajesh Kelekar ,  Aaron T Francis ,  Gregory P Lim

IPC: H01L21/76

CPC classification number: H01L21/76 ,  H01L21/02 ,  H01L21/306 ,  H01L21/67017

Abstract: Overlapping combinatorial processing can offer more processed regions, better particle performance and simpler process equipment. In overlapping combinatorial processing, one or more regions are processed in series with some degrees of overlapping between regions. In some embodiments, overlapping combinatorial processing can be used in conjunction with non-overlapping combinatorial processing and non-combinatorial processing to develop and investigate materials and processes for device processing and manufacturing.