公开(公告)号：US10915023B2

公开(公告)日：2021-02-09

申请号：US15802584

申请日：2017-11-03

Applicant: International Business Machines Corporation

Inventor： Shu-Jen Han ,  Brian Lin ,  Hareem T. Maune ,  Charles T. Rettner ,  Linda K. Sundberg ,  Leslie E. Thompson ,  Hoa D. Truong

IPC: H01L51/00 ,  G03F7/11 ,  G03F7/16 ,  G03F7/20 ,  H01L51/05 ,  G03F7/00 ,  G03F7/039

Abstract: A crosslinked self-assembled monolayer (SAM), comprising surface groups containing a nitrogen-heterocycle, was formed on an oxygen plasma-treated silicon oxide or hafnium oxide top surface of a substrate. The SAM is covalently bound to the underlying oxide layer. The SAM was patterned by direct write methods using ultraviolet (UV) light of wavelength 193 nm or an electron beam, forming a line-space pattern comprising non-exposed SAM features. The non-exposed SAM features non-covalently bound DNA-wrapped carbon nanotubes (DNA-CNT) deposited from aqueous solution with a selective placement efficiency of about 90%. Good alignment of carbon nanotubes to the long axis of the SAM features was also observed. The resulting patterned biopolymer features were used to prepare a CNT based field effect transistor.

公开(公告)号：US20190137879A1

公开(公告)日：2019-05-09

申请号：US15802584

申请日：2017-11-03

Applicant: International Business Machines Corporation

Inventor： Shu-Jen Han ,  Brian Lin ,  Hareem T. Maune ,  Charles T. Rettner ,  Linda K. Sundberg ,  Leslie E. Thompson ,  Hoa D. Truong ,  Willi Volksen

IPC: G03F7/11 ,  G03F7/16 ,  G03F7/20 ,  H01L51/00

Abstract: A crosslinked self-assembled monolayer (SAM), comprising surface groups containing a nitrogen-heterocycle, was formed on an oxygen plasma-treated silicon oxide or hafnium oxide top surface of a substrate. The SAM is covalently bound to the underlying oxide layer. The SAM was patterned by direct write methods using ultraviolet (UV) light of wavelength 193 nm or an electron beam, forming a line-space pattern comprising non-exposed SAM features. The non-exposed SAM features non-covalently bound DNA-wrapped carbon nanotubes (DNA-CNT) deposited from aqueous solution with a selective placement efficiency of about 90%. Good alignment of carbon nanotubes to the long axis of the SAM features was also observed. The resulting patterned biopolymer features were used to prepare a CNT based field effect transistor.