公开(公告)号：US06381303B1

公开(公告)日：2002-04-30

申请号：US09408894

申请日：1999-09-29

Applicant: Long Vu ,  Boris Yokhin ,  Isaac Mazor ,  Amos Gvirtzman

Inventor： Long Vu ,  Boris Yokhin ,  Isaac Mazor ,  Amos Gvirtzman

IPC: G01N23223

CPC classification number: G01N23/20

Abstract: Apparatus for X-ray microanalysis of a sample includes an X-ray source, which irradiates a spot having a dimension less than 500 &mgr;m on a surface of the sample. A first X-ray detector captures fluorescent X-rays emitted from the sample, responsive to the irradiation, at a high angle relative to the surface of the sample. A second X-ray detector captures X-rays from the spot at a grazing angle relative to the surface of the sample. Processing circuitry receives respective signals from the first and second X-ray detectors responsive to the X-rays captured thereby, and analyzes the signals in combination to determine a property of a surface layer of the sample within the area of the spot.

Abstract translation: 用于样品的X射线微量分析的装置包括X射线源，其在样品的表面上照射尺寸小于500μm的斑点。 第一X射线检测器相对于样品的表面以高角度捕获从样品发射的荧光X射线，其响应于照射。 第二个X射线检测器以相对于样品表面的掠角捕获来自斑点的X射线。 处理电路响应于由此捕获的X射线，从第一和第二X射线检测器接收相应的信号，并组合分析信号以确定样品在斑点区域内的表面层的性质。

公开(公告)号：US06351516B1

公开(公告)日：2002-02-26

申请号：US09461670

申请日：1999-12-14

Applicant: Isaac Mazor ,  Long Vu

Inventor： Isaac Mazor ,  Long Vu

IPC: G01N23223

CPC classification number: H01L21/76877 ,  G01N23/223 ,  G01N2223/076 ,  G01N2223/648 ,  H01L22/12

Abstract: A method for testing the deposition and/or the removal of a material within a recess on the surface of a sample. An excitation beam is directed onto a region of the sample in a vicinity of the recess, and an intensity of X-ray fluorescence, emitted from the region in a spectral range in which the material is known to fluoresce, is measured. A quantity of the material that is deposited within the recess is determined responsive to the measured intensity.

Abstract translation: 一种用于测试在样品表面上的凹槽内的材料的沉积和/或去除的方法。 激发光束被引导到在凹部附近的样品的区域上，并且测量从该材料已知发荧光的光谱范围内的区域发射的X射线荧光强度。 根据测量的强度确定沉积在凹部内的一定量的材料。