公开(公告)号：US07477017B2

公开(公告)日：2009-01-13

申请号：US11042228

申请日：2005-01-25

申请人： J. Gary Eden ,  Kuo-Feng Chen ,  Nels P. Ostrom ,  Sung-Jin Park

发明人： J. Gary Eden ,  Kuo-Feng Chen ,  Nels P. Ostrom ,  Sung-Jin Park

IPC分类号： H01J17/49

CPC分类号： H01J61/09 ,  H01J1/025 ,  H01J9/02 ,  H01J17/066 ,  H01J37/32018 ,  H01J37/32596 ,  H01J65/046

摘要： A method for fabricating microcavity discharge devices and arrays of devices. The devices are fabricated by layering a dielectric on a first conducting layer. A second conducting layer or structure is overlaid on the dielectric layer. In some devices, a microcavity is created that penetrates the second conducting layer or structure and the dielectric layer. In other devices, the microcavity penetrates to the first conducting layer. The second conducting layer or structure together with the inside face of the microcavity is overlaid with a second dielectric layer. The microcavities are then filled with a discharge gas. When a time-varying potential of the appropriate magnitude is applied between the conductors, a microplasma discharge is generated in the microcavity. These devices can exhibit extended lifetimes since the conductors are encapsulated, shielding the conductors from degradation due to exposure to the plasma. Some of the devices are flexible and the dielectric can be chosen to act as a mirror.

摘要翻译： 一种制造微腔放电装置和器件阵列的方法。 通过在第一导电层上层叠电介质来制造器件。 第二导电层或结构覆盖在电介质层上。 在一些装置中，产生穿过第二导电层或结构和电介质层的微腔。 在其他装置中，微腔穿透到第一导电层。 第二导电层或结构与微腔的内表面一起覆盖有第二介电层。 然后用放电气体填充微腔。 当在导体之间施加适当幅度的时变电位时，在微腔中产生微等离子体放电。 由于导体被封装，因此这些器件可以延长使用寿命，从而屏蔽导体不受暴露于等离子体的退化。 一些装置是柔性的，并且电介质可以选择用作反射镜。

公开(公告)号：US20080290799A1

公开(公告)日：2008-11-27

申请号：US11042228

申请日：2005-01-25

申请人： J. Gary Eden ,  Kuo-Feng Chen ,  Nels P. Ostrom ,  Sung-Jin Park

发明人： J. Gary Eden ,  Kuo-Feng Chen ,  Nels P. Ostrom ,  Sung-Jin Park

IPC分类号： H01J17/49

CPC分类号： H01J61/09 ,  H01J1/025 ,  H01J9/02 ,  H01J17/066 ,  H01J37/32018 ,  H01J37/32596 ,  H01J65/046

摘要： A method for fabricating microcavity discharge devices and arrays of devices. The devices are fabricated by layering a dielectric on a first conducting layer. A second conducting layer or structure is overlaid on the dielectric layer. In some devices, a microcavity is created that penetrates the second conducting layer or structure and the dielectric layer. In other devices, the microcavity penetrates to the first conducting layer. The second conducting layer or structure together with the inside face of the microcavity is overlaid with a second dielectric layer. The microcavities are then filled with a discharge gas. When a time-varying potential of the appropriate magnitude is applied between the conductors, a microplasma discharge is generated in the microcavity. These devices can exhibit extended lifetimes since the conductors are encapsulated, shielding the conductors from degradation due to exposure to the plasma. Some of the devices are flexible and the dielectric can be chosen to act as a mirror.

摘要翻译： 一种制造微腔放电装置和器件阵列的方法。 通过在第一导电层上层叠电介质来制造器件。 第二导电层或结构覆盖在电介质层上。 在一些装置中，产生穿过第二导电层或结构和电介质层的微腔。 在其他装置中，微腔穿透到第一导电层。 第二导电层或结构与微腔的内表面一起覆盖有第二介电层。 然后用放电气体填充微腔。 当在导体之间施加适当幅度的时变电位时，在微腔中产生微等离子体放电。 由于导体被封装，因此这些器件可以延长使用寿命，从而屏蔽导体不受暴露于等离子体的退化。 一些装置是柔性的，并且电介质可以选择用作反射镜。