公开(公告)号：US20110140073A1

公开(公告)日：2011-06-16

申请号：US12915630

申请日：2010-10-29

申请人： J. Gary Eden ,  Paul Tchertchian ,  Clark J. Wagner ,  Steve Solomon ,  Robert Ginn

发明人： J. Gary Eden ,  Paul Tchertchian ,  Clark J. Wagner ,  Steve Solomon ,  Robert Ginn

IPC分类号： H01L29/66

CPC分类号： H01J11/12 ,  H01J65/046 ,  H05H1/46

摘要： Preferred embodiments of the invention provide semiconducting microcavity plasma devices. Preferred embodiments of the invention are microcavity plasma devices having at least two pn junctions, separated by a microcavity or microchannel and powered by alternate half-cycles of a time-varying voltage waveform. Alternate embodiments have a single pn junction. Microplasma is produced throughout the cavity between single or multiple pn junctions and a dielectric layer isolates the microplasma from the single or multiple pn junctions. Additional preferred embodiments are devices in which the spatial extent of the plasma itself or the n or p regions associated with a pn junction are altered by a third (control) electrode.

摘要翻译： 本发明的优选实施例提供半导体微腔等离子体装置。 本发明的优选实施例是具有至少两个pn结的微腔等离子体装置，由微腔或微通道隔开并由时变电压波形的交替半周期供电。 备选实施例具有单个pn结。 在单个或多个pn结之间的整个空腔中产生微血管，并且介电层将微血管与单个或多个pn结隔离。 附加的优选实施例是其中等离子体本身的空间范围或与pn结相关联的n或p区域被第三（控制）电极改变的装置。

公开(公告)号：US08492744B2

公开(公告)日：2013-07-23

申请号：US12915630

申请日：2010-10-29

申请人： J. Gary Eden ,  Paul Tchertchian ,  Clark J. Wagner ,  Steve Solomon ,  Robert Ginn

发明人： J. Gary Eden ,  Paul Tchertchian ,  Clark J. Wagner ,  Steve Solomon ,  Robert Ginn

IPC分类号： H01L29/12

CPC分类号： H01J11/12 ,  H01J65/046 ,  H05H1/46

摘要： Preferred embodiments of the invention provide semiconducting microcavity plasma devices. Preferred embodiments of the invention are microcavity plasma devices having at least two pn junctions, separated by a microcavity or microchannel and powered by alternate half-cycles of a time-varying voltage waveform. Alternate embodiments have a single pn junction. Microplasma is produced throughout the cavity between single or multiple pn junctions and a dielectric layer isolates the microplasma from the single or multiple pn junctions. Additional preferred embodiments are devices in which the spatial extent of the plasma itself or the n or p regions associated with a pn junction are altered by a third (control) electrode.

摘要翻译： 本发明的优选实施例提供半导体微腔等离子体装置。 本发明的优选实施例是具有至少两个pn结的微腔等离子体装置，由微腔或微通道隔开并由时变电压波形的交替半周期供电。 备选实施例具有单个pn结。 在单个或多个pn结之间的整个空腔中产生微血管，并且介电层将微血管与单个或多个pn结隔离。 附加的优选实施例是其中等离子体本身的空间范围或与pn结相关联的n或p区域被第三（控制）电极改变的装置。