公开(公告)号：US11675208B1

公开(公告)日：2023-06-13

申请号：US17300091

申请日：2021-03-05

Applicant: J.A. WOOLLAM CO., INC

Inventor： Stefan Schoeche ,  Martin M. Liphardt ,  Ping He ,  Jeremy A Van Derslice ,  Craig M. Herzinger ,  Jeffrey S. Hale ,  Brian D. Guenther ,  Duane E. Meyer ,  John A Woollam ,  James D. Welch

IPC: G02B27/48 ,  G01B9/02 ,  G01B11/24

CPC classification number: G02B27/48 ,  G01B9/02084 ,  G01B11/24

Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.

公开(公告)号：US11035729B1

公开(公告)日：2021-06-15

申请号：US16602088

申请日：2019-08-05

Applicant: J.A. WOOLLAM CO., INC

Inventor： Jeremy A. Van Derslice ,  Martin M. Liphardt

IPC: G01J3/447 ,  G01B9/02 ,  G01N21/21 ,  G01J3/14

Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.

公开(公告)号：US09442016B2

公开(公告)日：2016-09-13

申请号：US14121915

申请日：2014-11-04

Applicant: J.A. WOOLLAM CO., INC

Inventor： Martin M. Liphardt ,  Jeffrey S. Hale ,  Ping He ,  Galen L. Pfeiffer

IPC: G01J4/00 ,  G01J4/04 ,  G02B19/00 ,  G01J1/04 ,  G01N21/21

CPC classification number: G02B17/0621 ,  G01J1/0411 ,  G01J1/0414 ,  G01J4/00 ,  G01J4/04 ,  G01N21/21 ,  G02B19/0023 ,  G02B19/0076 ,  G02B27/0012 ,  G02B27/286

Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.

公开(公告)号：US09360369B1

公开(公告)日：2016-06-07

申请号：US14545786

申请日：2015-06-20

Applicant: J.A. WOOLLAM CO., INC

Inventor： Galen L. Pfeiffer ,  Martin M. Liphardt

IPC: G01J4/00 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01N21/211 ,  G01N21/8422

Abstract: A system for easily determining average ellipsometric parameters based on data obtained from two different locations on a planar or non-planar shaped object, along with its method of use.

Abstract translation: 一种用于根据从平面或非平面形状物体上的两个不同位置获得的数据以及其使用方法容易地确定平均椭偏参数的系统。

公开(公告)号：US20220244169A1

公开(公告)日：2022-08-04

申请号：US17300660

申请日：2021-09-16

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Ping He ,  Martin M. Liphardt ,  Jeremy A. Van Derslice ,  Craig M. Herzinger ,  Jeffrey S. Hale ,  Brian D. Guenther ,  Duane E. Meyer ,  Stefan Schoeche ,  James D. Welch

IPC: G01N21/21 ,  G02B27/42

Abstract: Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.

公开(公告)号：US10989601B1

公开(公告)日：2021-04-27

申请号：US16873540

申请日：2020-05-01

Applicant: J.A. WOOLLAM CO., INC

Inventor： Martin M. Liphardt ,  Jeffrey S. Hale ,  Ping He ,  Galen L. Pfeiffer ,  Craig M. Herzinger

IPC: G01J4/00 ,  G01N21/21

Abstract: A method of applying a reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with reduced effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved.

公开(公告)号：US09500843B1

公开(公告)日：2016-11-22

申请号：US15330106

申请日：2016-08-08

Applicant: J.A. WOOLLAM CO., INC

Inventor： Martin M. Liphardt ,  Jeffrey S. Hale ,  Ping He ,  Galen L. Pfeiffer

IPC: G01J4/00 ,  G02B17/06 ,  G02B27/00 ,  G01J4/04

CPC classification number: G02B17/0621 ,  G01J1/0411 ,  G01J1/0414 ,  G01J4/00 ,  G01J4/04 ,  G01N21/21 ,  G02B19/0023 ,  G02B19/0076 ,  G02B27/0012 ,  G02B27/286

Abstract: A method of calibrating a reflective focusing optics to provide a system that minimizes the effect of multiple beam reflections therewithin on polarization state reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.

Abstract translation: 一种校准反射聚焦光学器件的方法，以提供使偏振状态反射光学系统中的多个光束反射的影响最小化的系统，其优选地需要存在具有光束反射表面的凸面和凹面镜，其应用实现 将电磁辐射束聚焦到样品上（其可以沿着与输入光束不同的轨迹），对输入光束偏振态的极化状态的影响最小化，基于调整的入射角和来自 各种镜子涉及。

公开(公告)号：US10209528B1

公开(公告)日：2019-02-19

申请号：US14545713

申请日：2015-06-09

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Martin M. Liphardt

IPC: G01J4/00 ,  G02B27/09 ,  G02B5/20 ,  G01J4/04

Abstract: A combination of a focusing element, and a filtering element which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed through the focusing element as a function of wavelength over a specified range of wavelengths, wherein the filtering element is not uniform, but rather varies as a selection from the group consisting of: optical density and/or thickness is greatest near the center thereof; and optical density and/or thickness is smallest near the center thereof; and can demonstrate neutral density characteristics outside the specified range of wavelengths. The combination of a focusing element, and a filtering element can optionally be present in an ellipsometer or polarimeter system.

公开(公告)号：US10132684B1

公开(公告)日：2018-11-20

申请号：US15330430

申请日：2016-09-20

Applicant: J.A. WOOLLAM CO., INC

Inventor： Jeremy A. Van Derslice ,  Martin M. Liphardt

IPC: G01J3/42 ,  G01J4/04 ,  G01J3/18 ,  G01J3/14 ,  G01J1/42

Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.

公开(公告)号：US10066989B1

公开(公告)日：2018-09-04

申请号：US15330353

申请日：2016-09-09

Applicant: J.A. WOOLLAM CO., INC

Inventor： Martin M. Liphardt ,  Ping He

IPC: G01J4/00 ,  G01J3/02 ,  G01J4/04

Abstract: A system for providing variable wavelength intensity attenuation to said focused beams by application of an aperture-like element that comprises at least two regions of “filter” material, or comprises different materials graded into one another, which different materials that have different responses to different wavelengths, wherein said system is applied to reduce differences in wavelength intensity levels when applied in collimated portions of a beam as a Spectral Angle Adjustor (SAA) or to preserve information in a beam while changing said beam effective diameter as a Spectral Aperture Stop (SAS); or to affect a Spectral Field Stop (SFS) that controls source image size when applied at a convergent/divergent beam focal point as a Spectrally Varying Aperture, (SVA) the end result depending on where in a beam it is applied.