-
公开(公告)号：US11035729B1
公开(公告)日：2021-06-15
申请号：US16602088
申请日：2019-08-05
Applicant: J.A. WOOLLAM CO., INC
Inventor： Jeremy A. Van Derslice , Martin M. Liphardt
Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.
-
公开(公告)号：US10422739B1
公开(公告)日：2019-09-24
申请号：US16350017
申请日：2018-09-12
Applicant: J.A. WOOLLAM CO., INC
Inventor： Jeremy A. Van Derslice , Martin M. Liphardt
Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.
-
3.发明申请Method to enhance sensitivity to surface normal optical functions of anisotropic films using attenuated total reflection 有权使用衰减全反射增强各向异性膜表面正常光学功能的灵敏度的方法公开(公告)号：US20160274032A1
公开(公告)日：2016-09-22
申请号：US14999365
申请日：2016-04-28
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Thomas E. Tiwald , Jeremy A. Van Derslice
CPC classification number: G01N21/8422 , G01M11/00 , G01N21/552 , G02B1/11 , G02B5/04 , G02B5/06 , G02B5/3083
Abstract: Methodology for determining optical functions of thin films with enhanced sensitivity to “p” polarized electromagnetic radiation reflected from both interfaces of an absorbing film.
Abstract translation: 用于确定具有增强的对吸收膜的两个界面反射的“p”极化电磁辐射的灵敏度的薄膜的光学功能的方法。
-
Patent Agency Ranking
公开(公告)号：US10175160B1
公开(公告)日：2019-01-08
申请号：US15932748
申请日：2018-04-20
Applicant: J.A. Woollam Co., Inc.
Inventor： Stefan Schoeche , Jeremy A. Van Derslice , Jeffrey S. Hale , Craig M. Herzinger
Abstract: Methodology of characterizing pore size distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on effective medium approaches, such as the Bruggeman effective medium approach.
-
公开(公告)号：US10132684B1
公开(公告)日：2018-11-20
申请号：US15330430
申请日：2016-09-20
Applicant: J.A. WOOLLAM CO., INC
Inventor： Jeremy A. Van Derslice , Martin M. Liphardt
Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.
-
公开(公告)号：US20220244169A1
公开(公告)日：2022-08-04
申请号：US17300660
申请日：2021-09-16
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Ping He , Martin M. Liphardt , Jeremy A. Van Derslice , Craig M. Herzinger , Jeffrey S. Hale , Brian D. Guenther , Duane E. Meyer , Stefan Schoeche , James D. Welch
Abstract: Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.
-
公开(公告)号：US09976902B1
公开(公告)日：2018-05-22
申请号：US15731298
申请日：2017-05-22
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Stefan Schoeche , Jeremy A. Van Derslice , Jeffrey S. Hale , Craig M. Herzinger
IPC: G01J4/00 , G01J3/447 , G06F17/17 , G01J4/04 , G01N21/21 , G06G7/30 , G03F7/004 , G06F17/12 , G06F17/18 , G06K15/22
CPC classification number: G01J3/447 , G01J4/04 , G01N21/211 , G01N2021/213 , G03F7/0042 , G06F17/12 , G06F17/17 , G06F17/175 , G06F17/18 , G06G7/30 , G06K15/225
Abstract: Methodology of characterizing pore size and distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on a Bruggerman effective medium.
-
公开(公告)号：US09599569B2
公开(公告)日：2017-03-21
申请号：US14999365
申请日：2016-04-28
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Thomas E. Tiwald , Jeremy A. Van Derslice
IPC: C23C16/52 , C23C14/28 , H05B6/00 , G01N21/84 , G02B5/30 , G02B1/11 , G02B5/04 , G02B5/06 , G01M11/00 , G01N21/552
CPC classification number: G01N21/8422 , G01M11/00 , G01N21/552 , G02B1/11 , G02B5/04 , G02B5/06 , G02B5/3083
Abstract: Methodology for determining optical functions of thin films with enhanced sensitivity to “p” polarized electromagnetic radiation reflected from both interfaces of an absorbing film.
-
-
-
-
-
-
-
Search Results
8
records
(took 0.013 seconds)
