公开(公告)号：US20140183169A1

公开(公告)日：2014-07-03

申请号：US14201324

申请日：2014-03-07

Applicant: JAPAN SCIENCE AND TECHNOLOGY AGENCY

Inventor： Junichi FUJITA

IPC: G01R3/00

CPC classification number: G01R3/00 ,  B82Y15/00 ,  B82Y30/00 ,  B82Y35/00 ,  H01J37/317 ,  H01J2237/316 ,  H01J2237/3165

Abstract: A sharpened metallic probe having a top of main body including a carbon-containing metal and a method and an apparatus for fabricating the metallic probe. A metallic probe with an extremely sharpened tip is obtained by inducing a field emission from the tip of the main body of the metallic probe where a nanotube is joined thereto, heating and melting locally the tip of the main body of the metallic probe by a Joule heating, and tearing the nanotube toward a counter electrode by a Coulomb attractive force.

Abstract translation: 一种具有包括含碳金属的主体顶部的金属探针和用于制造金属探针的方法和装置。 通过从金属探针的主体的尖端引起场发射，其中纳米管被接合到其上，通过焦耳将金属探针的主体的尖端局部加热和熔化，获得具有极尖锐尖的金属探针 通过库仑吸引力加热和撕开纳米管朝向对电极。