公开(公告)号：US20190080878A1

公开(公告)日：2019-03-14

申请号：US16123297

申请日：2018-09-06

Applicant: JEOL Ltd.

Inventor： Akihiro Ikeda ,  Norikazu Arima

IPC: H01J37/063 ,  G02B5/08 ,  H01J3/02

Abstract: An electron gun includes an emitter, an electron gun electrode, and a short-circuiting mechanism for setting the emitter and the electron gun electrode at the same potential. The short-circuiting mechanism includes a first switch member provided with a first switch electrode that is connected to the emitter and a second switch electrode that is connected to the electron gun electrode, a second switch member provided with a third switch electrode, and a drive unit that operates at least one of the first switch member and the second switch member to switch between a state in which the first switch electrode and the second switch electrode are in contact with the third switch electrode and a state in which the first switch electrode and the second switch electrode are separated from the third switch electrode. The short-circuiting mechanism has the same potential as a predetermined voltage.

公开(公告)号：US20250132118A1

公开(公告)日：2025-04-24

申请号：US18923770

申请日：2024-10-23

Applicant: JEOL Ltd.

Inventor： Yuji Kohno ,  Hidetaka Sawada ,  Akihiro Ikeda

IPC: H01J37/073 ,  H01J37/26

Abstract: There is provided a charged particle gun capable of increasing the number of charged particles contained in each pulse. The charged particle gun operates to emit a charged particle beam and includes: an emitter, an extraction electrode for extracting the charged particle beam from the emitter, a capacitor having one end connected to the extraction electrode, an offset power supply for supplying a first voltage to the one end of the capacitor via a resistor, a pulsed power supply providing an output of a second voltage, and a switch circuit that switches between whether the second voltage or a reference potential is supplied to the other end of the capacitor, based on a reference pulsed signal.

公开(公告)号：US11302509B2

公开(公告)日：2022-04-12

申请号：US16123297

申请日：2018-09-06

Applicant: JEOL Ltd.

Inventor： Akihiro Ikeda ,  Norikazu Arima

IPC: H01J37/063 ,  H01J3/02 ,  G02B5/08

Abstract: An electron gun includes an emitter, an electron gun electrode, and a short-circuiting mechanism for setting the emitter and the electron gun electrode at the same potential. The short-circuiting mechanism includes a first switch member provided with a first switch electrode that is connected to the emitter and a second switch electrode that is connected to the electron gun electrode, a second switch member provided with a third switch electrode, and a drive unit that operates at least one of the first switch member and the second switch member to switch between a state in which the first switch electrode and the second switch electrode are in contact with the third switch electrode and a state in which the first switch electrode and the second switch electrode are separated from the third switch electrode. The short-circuiting mechanism has the same potential as a predetermined voltage.