公开(公告)号：US20240142395A1

公开(公告)日：2024-05-02

申请号：US18386032

申请日：2023-11-01

Applicant: JEOL Ltd.

Inventor： Koki Kato ,  Shinya Fujita ,  Takanori Murano ,  Shigeru Honda

IPC: G01N23/2209 ,  G01N23/2252 ,  H01J37/147

CPC classification number: G01N23/2209 ,  G01N23/2252 ,  H01J37/1474 ,  G01N2223/079 ,  G01N2223/102 ,  G01N2223/32

Abstract: An analyzing method using an analyzer including a wavelength-dispersive X-ray spectrometer that has an analyzing element to analyze an X-ray emitted from a specimen and detects an X-ray of energy corresponding to a position of the analyzing element. The analyzing method includes acquiring a plurality of map data by repeatedly performing a mapping analysis while changing the position of the analyzing element, the mapping analysis being an analysis to detect an X-ray of specific energy with the position of the analyzing element fixed to acquire map data while scanning the specimen with an electron beam; and generating, based on the plurality of map data, a spectrum map in which a position on the specimen and an X-ray spectrum are associated with each other.