公开(公告)号：US20240142395A1

公开(公告)日：2024-05-02

申请号：US18386032

申请日：2023-11-01

Applicant: JEOL Ltd.

Inventor： Koki Kato ,  Shinya Fujita ,  Takanori Murano ,  Shigeru Honda

IPC: G01N23/2209 ,  G01N23/2252 ,  H01J37/147

CPC classification number: G01N23/2209 ,  G01N23/2252 ,  H01J37/1474 ,  G01N2223/079 ,  G01N2223/102 ,  G01N2223/32

Abstract: An analyzing method using an analyzer including a wavelength-dispersive X-ray spectrometer that has an analyzing element to analyze an X-ray emitted from a specimen and detects an X-ray of energy corresponding to a position of the analyzing element. The analyzing method includes acquiring a plurality of map data by repeatedly performing a mapping analysis while changing the position of the analyzing element, the mapping analysis being an analysis to detect an X-ray of specific energy with the position of the analyzing element fixed to acquire map data while scanning the specimen with an electron beam; and generating, based on the plurality of map data, a spectrum map in which a position on the specimen and an X-ray spectrum are associated with each other.

公开(公告)号：US11788976B2

公开(公告)日：2023-10-17

申请号：US17518612

申请日：2021-11-04

Applicant: JEOL Ltd.

Inventor： Takanori Murano ,  Fuminori Uematsu

IPC: G01N23/2209 ,  G01N23/223 ,  G06N3/08

CPC classification number: G01N23/2209 ,  G01N23/223 ,  G06N3/08 ,  G01N2223/0563

Abstract: In a preliminary measurement, spectrums obtained by detecting characteristic X-rays emitted from preliminary measurement points are transmitted to a spectrum processing unit via a noise filter unit. In a main measurement, a spectrum obtained by detecting characteristic X-rays emitted from a main measurement point is transmitted to the spectrum processing unit by bypassing the noise filter unit. The noise filter unit includes a machine learning type filter constituted of a CNN or the like. In a learning process, teacher data are generated using artificially-generated noise.

公开(公告)号：US10739284B2

公开(公告)日：2020-08-11

申请号：US16101633

申请日：2018-08-13

Applicant: JEOL Ltd.

Inventor： Takanori Murano

IPC: G01T1/36 ,  G01N23/2252 ,  H01J37/244

Abstract: An X-ray analyzer includes: a detector which detects X-rays generated from a specimen; a cooling element which cools the detector; and a spectrum generating unit which generates a spectrum based on a detection signal of the detector. The spectrum generating unit corrects an attenuation of intensity of a spectrum attributable to contamination of the detector, based on an elapsed time from a reference time until the X-rays are detected.

公开(公告)号：US20220172923A1

公开(公告)日：2022-06-02

申请号：US17534865

申请日：2021-11-24

Applicant: JEOL Ltd.

Inventor： Takanori Murano

IPC: H01J37/28 ,  H01J37/244

Abstract: A mask member is provided at an entrance opening of a mirror unit. Of a first diffraction grating and a second diffraction grating, when the second diffraction grating is used, the mask member masks preceding mirrors. With this process, aberration caused by reflective X-ray is suppressed. When the first diffraction grating is used, the mask member does not function. Alternatively, the mask member and another mask member may be selectively used.

公开(公告)号：US11131638B2

公开(公告)日：2021-09-28

申请号：US16716859

申请日：2019-12-17

Applicant: JEOL Ltd.

Inventor： Takanori Murano

IPC: G01N23/207 ,  G01N23/20008

Abstract: A calibration method is executed in an analysis device including a spectroscopic element for diffracting a signal generated from a specimen by irradiating the specimen with a primary beam, and a detector that detects the signal diffracted by the spectroscopic element, the detector having a plurality of detection regions arranged in an energy dispersion direction, and the detector detecting the signal to acquire a spectrum of the signal. The calibration method includes determining energy of the signal detected in each of the plurality of detection regions based on a positional relationship between the specimen and the spectroscopic element and a positional relationship between the spectroscopic element and each of the plurality of detection regions.

公开(公告)号：US20220026378A1

公开(公告)日：2022-01-27

申请号：US17383532

申请日：2021-07-23

Applicant: JEOL Ltd.

Inventor： Takaomi Yokoyama ,  Takanori Murano

IPC: G01N23/2252

Abstract: Spectrums are measured by irradiating an electron beam on a sample while varying an accelerating potential and by detecting X-rays emitted from the sample. A normalizer unit normalizes the spectrums and thereby calculates normalized spectrums. A difference calculator unit calculates difference spectrums based on the normalized spectrums. A search unit performs a search in a database for each comparison difference spectrum, and identifies compounds contained in the sample.

公开(公告)号：US20220026377A1

公开(公告)日：2022-01-27

申请号：US17381571

申请日：2021-07-21

Applicant: JEOL Ltd.

Inventor： Yasuaki Yamamoto ,  Takanori Murano

IPC: G01N23/2252

Abstract: Characteristic X-rays (soft X-rays) from a sample are detected using a spectroscope to thereby generate a plurality of intensity spectrums arranged in order of time sequence. A contour map creation unit creates a contour map by converting, in accordance with a color conversion condition, the plurality of intensity spectrums into a plurality of one-dimensional maps, and arranging the plurality of one-dimensional maps in order of time sequence. When displaying the contour map, a waveform array and a difference contour map may also be displayed. Based on the contour map, a timepoint at which a state change occurs in the sample is determined.

公开(公告)号：US20200284739A1

公开(公告)日：2020-09-10

申请号：US16810133

申请日：2020-03-05

Applicant: JEOL Ltd.

Inventor： Takanori Murano

IPC: G01N23/20091

Abstract: An analysis device includes a spectroscopic element that diffracts a signal generated by a specimen, a detector that detects the signal diffracted by the spectroscopic element, and a spectrum generation unit that generates a spectrum of the signal based on a detection result by the detector, the detector including detection regions arranged in a plurality of rows and a plurality of columns, a divergent direction of the signal incident on the detector being neither parallel nor perpendicular to a column direction of the detector, and the spectrum generation unit performing: processing for acquiring a plurality of row spectra by generating a row spectrum for each of the plurality of rows based on detection signals relating to the detection regions arranged in a row direction; and processing for generating a spectrum of the signal based on the plurality of row spectra.

公开(公告)号：US20190049396A1

公开(公告)日：2019-02-14

申请号：US16101633

申请日：2018-08-13

Applicant: JEOL Ltd.

Inventor： Takanori Murano

IPC: G01N23/2252 ,  G01T1/36

CPC classification number: G01N23/2252 ,  G01T1/36 ,  H01J37/244 ,  H01J2237/002 ,  H01J2237/2445

Abstract: An X-ray analyzer includes: a detector which detects X-rays generated from a specimen; a cooling element which cools the detector; and a spectrum generating unit which generates a spectrum based on a detection signal of the detector. The spectrum generating unit corrects an attenuation of intensity of a spectrum attributable to contamination of the detector, based on an elapsed time from a reference time until the X-rays are detected.

公开(公告)号：US11674913B2

公开(公告)日：2023-06-13

申请号：US17383532

申请日：2021-07-23

Applicant: JEOL Ltd.

Inventor： Takaomi Yokoyama ,  Takanori Murano

IPC: G01N23/2252 ,  G01N23/2209 ,  G01N23/2276

CPC classification number: G01N23/2252 ,  G01N23/2209 ,  G01N23/2276 ,  G01N2223/079

Abstract: Spectrums are measured by irradiating an electron beam on a sample while varying an accelerating potential and by detecting X-rays emitted from the sample. A normalizer unit normalizes the spectrums and thereby calculates normalized spectrums. A difference calculator unit calculates difference spectrums based on the normalized spectrums. A search unit performs a search in a database for each comparison difference spectrum, and identifies compounds contained in the sample.