公开(公告)号：US20160110896A1

公开(公告)日：2016-04-21

申请号：US14886345

申请日：2015-10-19

Applicant: JEOL Ltd.

Inventor： Norihisa Mori ,  Masaru Takakura ,  Shinya Fujita ,  Shigeru Honda ,  Naoki Kato ,  Shuichi Sakamoto

IPC: G06T11/20 ,  G06T11/60

CPC classification number: G01N23/225

Abstract: A scatter diagram display device includes a principal component analysis section that performs principal component analysis on intensity or concentration map data that represents each element, a priority level setting section that sets a priority level to each element based on the results of the principal component analysis performed by the principal component analysis section, and a display control section that performs a control process that arranges a plurality of scatter diagrams generated by combining each element based on the priority level that has been set to each element by the priority level setting section, and displays the plurality of scatter diagrams on a display section.

Abstract translation: 散点图显示装置包括：主成分分析部，对表示各要素的强度或浓度图数据进行主成分分析;优先级设定部，根据进行的主成分分析的结果，对各元素设定优先级; 以及显示控制部，其执行控制处理，该控制处理通过基于优先级设定部对每个要素设定的优先级进行组合而构成的多个散点图，并且显示 在显示部分上的多个散点图。

公开(公告)号：US20240142395A1

公开(公告)日：2024-05-02

申请号：US18386032

申请日：2023-11-01

Applicant: JEOL Ltd.

Inventor： Koki Kato ,  Shinya Fujita ,  Takanori Murano ,  Shigeru Honda

IPC: G01N23/2209 ,  G01N23/2252 ,  H01J37/147

CPC classification number: G01N23/2209 ,  G01N23/2252 ,  H01J37/1474 ,  G01N2223/079 ,  G01N2223/102 ,  G01N2223/32

Abstract: An analyzing method using an analyzer including a wavelength-dispersive X-ray spectrometer that has an analyzing element to analyze an X-ray emitted from a specimen and detects an X-ray of energy corresponding to a position of the analyzing element. The analyzing method includes acquiring a plurality of map data by repeatedly performing a mapping analysis while changing the position of the analyzing element, the mapping analysis being an analysis to detect an X-ray of specific energy with the position of the analyzing element fixed to acquire map data while scanning the specimen with an electron beam; and generating, based on the plurality of map data, a spectrum map in which a position on the specimen and an X-ray spectrum are associated with each other.

公开(公告)号：US20150362446A1

公开(公告)日：2015-12-17

申请号：US14716984

申请日：2015-05-20

Applicant: JEOL Ltd.

Inventor： Naoki Kato ,  Masaru Takakura ,  Norihisa Mori ,  Shinya Fujita ,  Shigeru Honda

IPC: G01N23/225 ,  H01J37/244 ,  H01J37/06

CPC classification number: G01N23/2252 ,  H01J37/244 ,  H01J2237/2445 ,  H01J2237/2448

Abstract: A phase analyzer includes a principal component analysis section that performs principal component analysis on elemental map data that represents an intensity or concentration distribution corresponding to each element to calculate a principal component score corresponding to each unit area of the elemental map data, a scatter diagram generation section that plots the calculated principal component score to generate a scatter diagram of the principal component score, a peak position detection section that detects a peak position from the scatter diagram, a clustering section that calculates a distance between each point and each peak position within the scatter diagram, and classifies each point within the scatter diagram into a plurality of groups based on the distance, and a phase map generation section that generates a phase map based on classification results of the clustering section.

Abstract translation: 相位分析器包括：主成分分析部，其对表示与各元素对应的强度或浓度分布的元素图数据进行主成分分析，计算与基本图数据的各单位面积对应的主成分分数;散点图生成 绘制计算出的主成分分数以生成主分量分数的散点图，峰值位置检测部分，其根据散点图检测峰值位置;聚类部分，其计算每个点与每个峰值位置之间的距离; 散点图，并且根据距离将散点图内的每个点分类成多个组;以及相位图生成部，其基于聚类部的分类结果生成相位图。

公开(公告)号：US09874532B2

公开(公告)日：2018-01-23

申请号：US14886345

申请日：2015-10-19

Applicant: JEOL Ltd.

Inventor： Norihisa Mori ,  Masaru Takakura ,  Shinya Fujita ,  Shigeru Honda ,  Naoki Kato ,  Shuichi Sakamoto

IPC: G06T11/20 ,  G01N23/225

CPC classification number: G01N23/225

Abstract: A scatter diagram display device includes a principal component analysis section that performs principal component analysis on intensity or concentration map data that represents each element, a priority level setting section that sets a priority level to each element based on the results of the principal component analysis performed by the principal component analysis section, and a display control section that performs a control process that arranges a plurality of scatter diagrams generated by combining each element based on the priority level that has been set to each element by the priority level setting section, and displays the plurality of scatter diagrams on a display section.

公开(公告)号：US09518942B2

公开(公告)日：2016-12-13

申请号：US14716984

申请日：2015-05-20

Applicant: JEOL Ltd.

Inventor： Naoki Kato ,  Masaru Takakura ,  Norihisa Mori ,  Shinya Fujita ,  Shigeru Honda

IPC: G01N23/222 ,  G01N23/225 ,  H01J37/244

CPC classification number: G01N23/2252 ,  H01J37/244 ,  H01J2237/2445 ,  H01J2237/2448

Abstract: A phase analyzer includes a principal component analysis section that performs principal component analysis on elemental map data that represents an intensity or concentration distribution corresponding to each element to calculate a principal component score corresponding to each unit area of the elemental map data, a scatter diagram generation section that plots the calculated principal component score to generate a scatter diagram of the principal component score, a peak position detection section that detects a peak position from the scatter diagram, a clustering section that calculates a distance between each point and each peak position within the scatter diagram, and classifies each point within the scatter diagram into a plurality of groups based on the distance, and a phase map generation section that generates a phase map based on classification results of the clustering section.

Abstract translation: 相位分析器包括：主成分分析部，其对表示与各元素对应的强度或浓度分布的元素图数据进行主成分分析，计算与基本图数据的各单位面积对应的主成分分数;散点图生成 绘制计算出的主成分分数以生成主分量分数的散点图，峰值位置检测部分，其根据散点图检测峰值位置;聚类部分，其计算每个点与每个峰值位置之间的距离; 散点图，并且根据距离将散点图内的每个点分类成多个组;以及相位图生成部，其基于聚类部的分类结果生成相位图。