公开(公告)号：US20230274910A1

公开(公告)日：2023-08-31

申请号：US18112687

申请日：2023-02-22

Applicant: JEOL Ltd.

Inventor： Takeshi Otsuka ,  Sadahiko Mochizuki

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/24475 ,  H01J2237/2448

Abstract: Light which is radiant energy is emitted from a sample which is heated, and is detected by a backscattered electron detector. A detection signal from the backscattered electron detector includes a radiant component. A radiant component removal section extracts the radiant component from the detection signal using a filter, and then removes the radiant component from the detection signal. An optical detector which detects the radiant component may be provided. A divided detector may be provided as the backscattered electron detector.