公开(公告)号：US20220392737A1

公开(公告)日：2022-12-08

申请号：US17830873

申请日：2022-06-02

Applicant: JEOL Ltd.

Inventor： Takeshi Otsuka

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/244

Abstract: An electron beam is irradiated on a specimen in a state where a negative voltage is applied to the specimen. The specimen is rotated to establish an optimum orientation of a specimen surface shape relative to an orientation of a detector having two detection surfaces disposed at rotational symmetric positions with respect to an optical axis of the electron beam taken as an axis of rotation, and an image is generated based on a quantity of a signal from reflected electrons detected by the detector.

公开(公告)号：US20190362934A1

公开(公告)日：2019-11-28

申请号：US16420466

申请日：2019-05-23

Applicant: JEOL Ltd.

Inventor： Takeshi Otsuka

IPC: H01J37/28 ,  H01J37/22 ,  G06T7/90 ,  G01N23/2251

Abstract: A charged particle beam apparatus acquires a scanned image by scanning a sample with a charged particle beam and detecting charged particles emitted from the sample. The charged particle beam apparatus includes: a plurality of detection units that detect charged particles emitted from the sample; and an image processing unit that generates the scanned image based on a plurality of detection signals outputted from the plurality of the detection units. The image processing unit performs a process of calculating a tilt direction of a sample surface and a tilt angle of the sample surface based on the plurality of the detection signals for an irradiation position of the charged particle beam; and a process of determining a color of a pixel of the scanned image according to the calculated tilt direction and the calculated tilt angle.

公开(公告)号：US20190362930A1

公开(公告)日：2019-11-28

申请号：US16420502

申请日：2019-05-23

Applicant: JEOL Ltd.

Inventor： Takeshi Otsuka

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/244

Abstract: A charged particle beam apparatus acquires a scanned image by scanning a sample with a charged particle beam and detecting charged particles emitted from the sample. The charged particle beam apparatus includes: a plurality of detection units that detect charged particles emitted from the sample, and an image processing unit that generates the scanned image based on a plurality of detection signals outputted from the plurality of the detection units. The image processing unit performs a process of acquiring the plurality of the detection signals at an irradiation position of the charged particle beam; a process of extracting a maximum value and a minimum value from among signal amounts of the plurality of the acquired detection signals, and calculating a difference between the maximum value and the minimum value; a process of calculating a sum total of the signal amounts of the plurality of the detection signals; and a process of determining a pixel value of a pixel of the scanned image corresponding to the irradiation position based on a sum of a first value that is obtained based on the sum total and a second value that is obtained based on the difference.

公开(公告)号：US20240385131A1

公开(公告)日：2024-11-21

申请号：US18663519

申请日：2024-05-14

Applicant: JEOL Ltd.

Inventor： Takeshi Otsuka ,  Kei Nagatomo

IPC: G01N23/2251 ,  G01N23/203 ,  G01N23/2206

Abstract: An analysis device includes an electron beam source that irradiates a sample with a charged particle beam, and a detection unit having a plurality of detection regions that detects electrons emitted from the sample irradiated with the charged particle beam. The analysis device includes an arithmetic processing unit 100 that performs predetermined arithmetic processing on strength distribution of a plurality of detection signals respectively detected by the plurality of detection regions.

公开(公告)号：US12148594B2

公开(公告)日：2024-11-19

申请号：US17831144

申请日：2022-06-02

Applicant: JEOL Ltd.

Inventor： Takeshi Otsuka

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/28

Abstract: A charged particle beam apparatus acquires a scanned image by scanning a specimen with a charged particle beam, and detecting charged particles emitted from the specimen. The apparatus includes a charged particle beam source that emits the charged particle beam; an irradiation optical system that scans the specimen with the charged particle beam; a plurality of detection units that detects the charged particles emitted from the specimen; and an image processing unit that reconstructs a profile of a specimen surface of the specimen, based on a plurality of detection signals outputted from the plurality of detection units. The image processing unit: determines an inclination angle of the specimen surface, based on the plurality of detection signals; processing to determine a height of the specimen surface, based on the scanned image; and reconstructs the profile of the specimen surface, based on the inclination angle and the height.

公开(公告)号：US10763077B2

公开(公告)日：2020-09-01

申请号：US16420466

申请日：2019-05-23

Applicant: JEOL Ltd.

Inventor： Takeshi Otsuka

IPC: H01J37/28 ,  G06T7/90 ,  G01N23/2251 ,  H01J37/22

Abstract: A charged particle beam apparatus acquires a scanned image by scanning a sample with a charged particle beam and detecting charged particles emitted from the sample. The charged particle beam apparatus includes: a plurality of detection units that detect charged particles emitted from the sample; and an image processing unit that generates the scanned image based on a plurality of detection signals outputted from the plurality of the detection units. The image processing unit performs a process of calculating a tilt direction of a sample surface and a tilt angle of the sample surface based on the plurality of the detection signals for an irradiation position of the charged particle beam; and a process of determining a color of a pixel of the scanned image according to the calculated tilt direction and the calculated tilt angle.

公开(公告)号：US10720304B2

公开(公告)日：2020-07-21

申请号：US16420502

申请日：2019-05-23

Applicant: JEOL Ltd.

Inventor： Takeshi Otsuka

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/28

Abstract: A charged particle beam apparatus acquires a scanned image by scanning a sample with a charged particle beam and detecting charged particles emitted from the sample. The charged particle beam apparatus includes: a plurality of detection units that detect charged particles emitted from the sample, and an image processing unit that generates the scanned image based on a plurality of detection signals outputted from the plurality of the detection units. The image processing unit performs a process of acquiring the plurality of the detection signals at an irradiation position of the charged particle beam; a process of extracting a maximum value and a minimum value from among signal amounts of the plurality of the acquired detection signals, and calculating a difference between the maximum value and the minimum value; a process of calculating a sum total of the signal amounts of the plurality of the detection signals; and a process of determining a pixel value of a pixel of the scanned image corresponding to the irradiation position based on a sum of a first value that is obtained based on the sum total and a second value that is obtained based on the difference.

公开(公告)号：US20230274910A1

公开(公告)日：2023-08-31

申请号：US18112687

申请日：2023-02-22

Applicant: JEOL Ltd.

Inventor： Takeshi Otsuka ,  Sadahiko Mochizuki

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/24475 ,  H01J2237/2448

Abstract: Light which is radiant energy is emitted from a sample which is heated, and is detected by a backscattered electron detector. A detection signal from the backscattered electron detector includes a radiant component. A radiant component removal section extracts the radiant component from the detection signal using a filter, and then removes the radiant component from the detection signal. An optical detector which detects the radiant component may be provided. A divided detector may be provided as the backscattered electron detector.

公开(公告)号：US20240335885A1

公开(公告)日：2024-10-10

申请号：US18617081

申请日：2024-03-26

Applicant: JEOL Ltd.

Inventor： Nari Tsutagawa ,  Shinichi Kitamura ,  Takeshi Otsuka ,  Taku Hisaki

IPC: B22F12/90 ,  B22F10/36 ,  B22F10/37 ,  B22F12/30 ,  B22F12/41 ,  B22F12/52 ,  B33Y30/00 ,  B33Y50/02

CPC classification number: B22F12/90 ,  B22F10/36 ,  B22F10/37 ,  B22F12/30 ,  B22F12/41 ,  B22F12/52 ,  B33Y30/00 ,  B33Y50/02

Abstract: A three-dimensional PBF-AM apparatus includes a build plate, a powder supply device, a beam irradiation device, a plurality of detection units, and a control unit. The control unit has a plurality of arithmetic expressions. Then, the control unit selects, according to a build step, a predetermined arithmetic expression from the plurality of arithmetic expressions, uses the selected arithmetic expression to perform arithmetic processing on a plurality of backscattered electron signals, and calculates an arithmetic signal.

公开(公告)号：US20220392738A1

公开(公告)日：2022-12-08

申请号：US17831144

申请日：2022-06-02

Applicant: JEOL Ltd.

Inventor： Takeshi Otsuka

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/244

Abstract: A charged particle beam apparatus acquires a scanned image by scanning a specimen with a charged particle beam, and detecting charged particles emitted from the specimen. The apparatus includes a charged particle beam source that emits the charged particle beam; an irradiation optical system that scans the specimen with the charged particle beam; a plurality of detection units that detects the charged particles emitted from the specimen; and an image processing unit that reconstructs a profile of a specimen surface of the specimen, based on a plurality of detection signals outputted from the plurality of detection units. The image processing unit: determines an inclination angle of the specimen surface, based on the plurality of detection signals; processing to determine a height of the specimen surface, based on the scanned image; and reconstructs the profile of the specimen surface, based on the inclination angle and the height.