公开(公告)号：US11674913B2

公开(公告)日：2023-06-13

申请号：US17383532

申请日：2021-07-23

Applicant: JEOL Ltd.

Inventor： Takaomi Yokoyama ,  Takanori Murano

IPC: G01N23/2252 ,  G01N23/2209 ,  G01N23/2276

CPC classification number: G01N23/2252 ,  G01N23/2209 ,  G01N23/2276 ,  G01N2223/079

Abstract: Spectrums are measured by irradiating an electron beam on a sample while varying an accelerating potential and by detecting X-rays emitted from the sample. A normalizer unit normalizes the spectrums and thereby calculates normalized spectrums. A difference calculator unit calculates difference spectrums based on the normalized spectrums. A search unit performs a search in a database for each comparison difference spectrum, and identifies compounds contained in the sample.

公开(公告)号：US20220026378A1

公开(公告)日：2022-01-27

申请号：US17383532

申请日：2021-07-23

Applicant: JEOL Ltd.

Inventor： Takaomi Yokoyama ,  Takanori Murano

IPC: G01N23/2252

Abstract: Spectrums are measured by irradiating an electron beam on a sample while varying an accelerating potential and by detecting X-rays emitted from the sample. A normalizer unit normalizes the spectrums and thereby calculates normalized spectrums. A difference calculator unit calculates difference spectrums based on the normalized spectrums. A search unit performs a search in a database for each comparison difference spectrum, and identifies compounds contained in the sample.

公开(公告)号：US20240085357A1

公开(公告)日：2024-03-14

申请号：US17941394

申请日：2022-09-09

Applicant: JEOL Ltd.

Inventor： Hideyuki Takahashi ,  Takaomi Yokoyama

IPC: G01N23/2252 ,  G06T11/00 ,  H01J37/244 ,  H01J37/28

CPC classification number: G01N23/2252 ,  G06T11/00 ,  H01J37/244 ,  H01J37/28 ,  G01N2223/079 ,  G01N2223/418 ,  G01N2223/507 ,  H01J2237/2445

Abstract: An electron beam accelerated using a first acceleration voltage is applied to respective positions on a sample to obtain spectra A at the respective positions, and an electron beam accelerated using a second acceleration voltage different from the first acceleration voltage is applied to the respective positions on the sample to obtain spectra B at the respective positions. Then, a spectral ratio A/B of the spectra is calculated at each of the positions to generate a waveform representing the spectral ratio A/B. The value of a spectral ratio A/B in an energy region of interest is extracted from each of the waveforms. The extracted values are mapped onto points corresponding to the respective positions on the sample, whereby a spectral map is generated. The spectral map is displayed.