公开(公告)号：US12112923B2

公开(公告)日：2024-10-08

申请号：US17292796

申请日：2019-09-18

Applicant: JIANGSU LEUVEN INSTRUMENTS CO. LTD

Inventor： Na Li ,  Shiran Cheng ,  Haiyang Liu ,  Zhaochao Chen ,  Yonggang Hou ,  Chengyi Wang ,  Dongdong Hu ,  Kaidong Xu

IPC: H01J37/32

CPC classification number: H01J37/32495 ,  H01J2237/334

Abstract: A reaction chamber lining including an annular side wall and a flange arranged on an upper portion of the side wall. An end face of the flange extends from the side wall in a radial direction, an outer edge of the flange extends in the radial direction to form fixing flanging parts, and a hole is in each of the fixing flanging parts. The side wall includes a rectangular slot, and a position of the rectangular slot corresponds to a position of a robotic arm access hole in a side wall of a reaction chamber. The side wall includes through holes and honeycomb-shaped apertures. A face joined to the bottom of the side wall includes a disc extending inwards in the radial direction, an extending end of the disc is fitted with an outer edge of an electrode assembly. A plurality of circles of slotted holes are in the disc.