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1.
公开(公告)号:US11021433B2
公开(公告)日:2021-06-01
申请号:US16719921
申请日:2019-12-18
Applicant: JNC CORPORATION
Inventor: Daisuke Inoki , Teizi Satou , Hideki Hayashi
IPC: C07C69/653 , C07C67/03 , C08L33/14 , G03F7/004 , G03F7/038
Abstract: A (meth)acrylate compound excellent in compatibility with other photosensitive resins and capable of providing a polymer with high transparency, a polymer, a resist material, and a method for producing the (meth)acrylate compound.
The (meth)acrylate compound is represented by formula (1).-
公开(公告)号:US11312804B2
公开(公告)日:2022-04-26
申请号:US16968874
申请日:2019-02-13
Applicant: JNC CORPORATION
Inventor: Koichi Shibata , Teizi Satou , Daisuke Inoki , Hideki Hayashi
IPC: C07D309/30 , C08F220/28 , G03F7/004
Abstract: A polymerizable compound represented by formula (1). In formula (1), one of eight hydrogen atoms is substituted by a (meth)acryloyloxy group, and the rest seven hydrogen atoms are independently non-substituted or substituted by a saturated hydrocarbon group having 1 to 10 carbons.
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