Abstract:
Method for manufacturing organic EL element, including: reducing internal pressure of vacuum chamber by vacuum pump connected thereto in state where substrate with applied film formed thereon is placed in vacuum chamber, applied film having been formed by applying material of organic light-emitting layer to substrate; and purifying applied film having passed through reducing the internal pressure of the vacuum chamber. Diphenylamine is used in portion of vacuum pump that is connected to inside of vacuum chamber. Reducing internal pressure of vacuum chamber is performed such that molecules of diphenylamine fly from vacuum pump into vacuum chamber and some of molecules are taken into applied film, and purifying is performed so that content of diphenylamine in applied film is in range from more than 0 nmol/cm3 to 13.8 nmol/cm3.
Abstract translation:用于制造有机EL元件的方法包括:在其上形成有基底的基板放置在真空室中的状态下,通过与其连接的真空泵降低真空室的内部压力,通过施加有机发光层的材料形成的涂布膜 基质; 并通过减压真空室的内部压力净化所施加的膜。 二苯胺用于连接到真空室内部的真空泵部分。 进行真空室的内部压力的降低,使得二苯胺的分子从真空泵飞入真空室,将一些分子吸入涂膜中,进行净化,使得涂膜中二苯胺的含量在0nmol以上 cm 3至13.8nmol / cm 3。
Abstract:
A manufacturing method including: forming a first electrode; forming a first bank; forming a first organic functional film; forming a second bank; forming a second organic functional film; and forming a second electrode. In the forming of the second bank, the second bank is formed such that, in plan view, a bottom edge of a sidewall surface of the second bank facing the second aperture is located at the same position as or is set back from a bottom edge of a sidewall surface of the first bank facing the first aperture. In the forming of the second organic functional film, the droplet of the second ink is applied such that an upper edge of the second organic functional film within the second aperture is located at a same level as or at a higher level than the bottom edge of the sidewall surface of the second bank.