公开(公告)号：US09209401B2

公开(公告)日：2015-12-08

申请号：US14348103

申请日：2013-05-09

Applicant: JOLED INC.

Inventor： Yuko Kawanami ,  Takako Kurosawa ,  Haruka Kusukame

IPC: H01L21/00 ,  H01L51/00 ,  H01L27/32 ,  H01L51/56 ,  H01L51/50

CPC classification number: H01L51/0029 ,  H01L27/3244 ,  H01L51/001 ,  H01L51/0025 ,  H01L51/0059 ,  H01L51/5012 ,  H01L51/5056 ,  H01L51/56

Abstract: Method for manufacturing organic EL element, including: reducing internal pressure of vacuum chamber by vacuum pump connected thereto in state where substrate with applied film formed thereon is placed in vacuum chamber, applied film having been formed by applying material of organic light-emitting layer to substrate; and purifying applied film having passed through reducing the internal pressure of the vacuum chamber. Diphenylamine is used in portion of vacuum pump that is connected to inside of vacuum chamber. Reducing internal pressure of vacuum chamber is performed such that molecules of diphenylamine fly from vacuum pump into vacuum chamber and some of molecules are taken into applied film, and purifying is performed so that content of diphenylamine in applied film is in range from more than 0 nmol/cm3 to 13.8 nmol/cm3.

Abstract translation: 用于制造有机EL元件的方法包括：在其上形成有基底的基板放置在真空室中的状态下，通过与其连接的真空泵降低真空室的内部压力，通过施加有机发光层的材料形成的涂布膜 基质; 并通过减压真空室的内部压力净化所施加的膜。 二苯胺用于连接到真空室内部的真空泵部分。 进行真空室的内部压力的降低，使得二苯胺的分子从真空泵飞入真空室，将一些分子吸入涂膜中，进行净化，使得涂膜中二苯胺的含量在0nmol以上 cm 3至13.8nmol / cm 3。