公开(公告)号：US09224956B2

公开(公告)日：2015-12-29

申请号：US14386543

申请日：2013-03-19

申请人： JOLED INC.

发明人： Yuko Kawanami ,  Ryuuta Yamada

IPC分类号： H01L21/00 ,  H01L51/00 ,  H01L51/50 ,  F04B37/14 ,  C23C14/56 ,  B01J3/00 ,  F17D3/00 ,  H01L51/56 ,  H01L27/32

CPC分类号： H01L51/0029 ,  B01J3/006 ,  C23C14/564 ,  F04B37/14 ,  F17D3/00 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0021 ,  H01L51/5056 ,  H01L51/56 ,  Y10T137/0379

摘要： A method for reducing an internal pressure of a vacuum chamber while preventing impurity contamination within the vacuum chamber as much as possible is provided. The method includes: rough pumping reducing an internal pressure of a vacuum chamber by using a roughing pump, the roughing pump being a mechanical pump that is capable of reducing the internal pressure of the vacuum chamber to be less than 15 Pa; main pumping reducing the internal pressure of the vacuum chamber by using a main pump after the rough pumping, the main pump being a non-mechanical pump. Transition from the rough pumping to the main pumping is performed when the internal pressure of the vacuum chamber is no less than 15 Pa.

摘要翻译： 提供一种减少真空室的内部压力同时尽可能防止真空室内的杂质污染的方法。 该方法包括：粗抽泵通过使用粗抽泵减小真空室的内部压力，粗抽泵是能够将真空室的内部压力降低到15Pa以下的机械泵; 主泵在粗抽后通过使用主泵减少真空室的内部压力，主泵是非机械泵。 当真空室的内部压力不小于15Pa时，执行从粗泵送到主泵送的过渡。

公开(公告)号：US09595695B2

公开(公告)日：2017-03-14

申请号：US14237928

申请日：2013-06-06

申请人： JOLED INC.

发明人： Yuko Kawanami

IPC分类号： H01L51/56 ,  C23C14/56 ,  H01L51/00 ,  H01L51/50

CPC分类号： H01L51/56 ,  C23C14/564 ,  H01L51/0025 ,  H01L51/0059 ,  H01L51/50

摘要： A method for using a vacuum apparatus that includes a vacuum chamber and a pump, the vacuum chamber housing an object, the pump reducing an internal pressure of the vacuum chamber, the method including: ventilating inside the vacuum chamber by introducing a gas into the vacuum chamber and discharging the gas from the vacuum chamber by causing the pump to reduce the internal pressure of the vacuum chamber. In the ventilating, a discharge rate at which molecules of the gas per unit volume are discharged is at least 3.3×10−5 mol/(s·L), and the temperature in the vacuum chamber is at least 15° C. and at most 80° C.

摘要翻译： 一种使用包括真空室和泵的真空装置的方法，所述真空室容纳物体，所述泵减小所述真空室的内部压力，所述方法包括：通过将气体引入所述真空中来在所述真空室内通风 并通过使泵减小真空室的内部压力从真空室排出气体。 在通气中，每单位体积的气体分子排出量为3.3×10 -5 mol /（s·L）以上，真空室内的温度为15℃以上 最多80°C

公开(公告)号：US09209401B2

公开(公告)日：2015-12-08

申请号：US14348103

申请日：2013-05-09

申请人： JOLED INC.

发明人： Yuko Kawanami ,  Takako Kurosawa ,  Haruka Kusukame

IPC分类号： H01L21/00 ,  H01L51/00 ,  H01L27/32 ,  H01L51/56 ,  H01L51/50

CPC分类号： H01L51/0029 ,  H01L27/3244 ,  H01L51/001 ,  H01L51/0025 ,  H01L51/0059 ,  H01L51/5012 ,  H01L51/5056 ,  H01L51/56

摘要： Method for manufacturing organic EL element, including: reducing internal pressure of vacuum chamber by vacuum pump connected thereto in state where substrate with applied film formed thereon is placed in vacuum chamber, applied film having been formed by applying material of organic light-emitting layer to substrate; and purifying applied film having passed through reducing the internal pressure of the vacuum chamber. Diphenylamine is used in portion of vacuum pump that is connected to inside of vacuum chamber. Reducing internal pressure of vacuum chamber is performed such that molecules of diphenylamine fly from vacuum pump into vacuum chamber and some of molecules are taken into applied film, and purifying is performed so that content of diphenylamine in applied film is in range from more than 0 nmol/cm3 to 13.8 nmol/cm3.

摘要翻译： 用于制造有机EL元件的方法包括：在其上形成有基底的基板放置在真空室中的状态下，通过与其连接的真空泵降低真空室的内部压力，通过施加有机发光层的材料形成的涂布膜 基质; 并通过减压真空室的内部压力净化所施加的膜。 二苯胺用于连接到真空室内部的真空泵部分。 进行真空室的内部压力的降低，使得二苯胺的分子从真空泵飞入真空室，将一些分子吸入涂膜中，进行净化，使得涂膜中二苯胺的含量在0nmol以上 cm 3至13.8nmol / cm 3。