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公开(公告)号：US20230001518A1
公开(公告)日：2023-01-05
申请号：US17749445
申请日：2022-05-20
发明人： Kenichi Ohmori , Yuzaburo Ohta , Rei Matsushita
摘要： A laser irradiation apparatus is a laser irradiation apparatus including a laser light source, the laser irradiation apparatus including a failure prediction unit configured to perform failure prediction on a movable part used when a substrate is processed by the laser light source, in which the failure prediction unit acquires a physical quantity when the movable part is movable, and derives a failure time of the movable part based on an acquired physical quantity.
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公开(公告)号：US20230006408A1
公开(公告)日：2023-01-05
申请号：US17747204
申请日：2022-05-18
发明人： Kenichi Ohmori , Yuzaburo Ohta , Rei Matsushita , Nobuo Oku
摘要： A laser irradiation apparatus is a laser irradiation apparatus including a plurality of laser light sources, the laser irradiation apparatus including a control unit configured to perform control with regard to laser emitted from the plurality of laser light sources, in which the control unit acquires characteristic information of each of the plurality of laser light sources, and performs a predetermined process according to each piece of acquired characteristic information.
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3.发明公开公开(公告)号：US20240322518A1
公开(公告)日：2024-09-26
申请号：US18580485
申请日：2022-03-22
发明人： Kenichi Ohmori , Yuzaburo Ohta , Rei Matsushita
IPC分类号： H01S3/10 , B23K26/03 , B23K26/073
CPC分类号： H01S3/10069 , B23K26/032 , B23K26/073
摘要： Provided is a laser irradiation device including: a laser light source that emits laser light; and a control unit that performs control relating to irradiation of a substrate with laser light. The control unit acquires operation parameters including a detection value from a detection unit provided in the laser irradiation device, derives predicted quality information by inputting the acquired operation parameters to a learning model that outputs predicted quality information of a product including the substrate irradiated with the laser light in a case where the operation parameters are input, and outputs the derived predicted quality information and the acquired operation parameters in association with each other.
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公开(公告)号：US20230011292A1
公开(公告)日：2023-01-12
申请号：US17743900
申请日：2022-05-13
发明人： Kenichi Ohmori , Yuzaburo Ohta , Rei Matsushita
摘要： A laser irradiation apparatus including a laser light source includes a first detection unit and a second detection unit configured to detect luminance of a substrate irradiated with laser light from the laser light source, and a control unit configured to perform control related to laser light emitted from the laser light source, in which the control unit specifies an energy density of laser light based on luminance detected by the first detection unit, specifies reference luminance based on a specified energy density and luminance detected by the second detection unit, and changes an energy density of laser light according to the reference luminance and luminance detected by the second detection unit.
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