METHODS OF DETECTING STRESSES, METHODS OF TRAINING COMPACT MODELS, METHODS OF RELAXING STRESSES, AND COMPUTING SYSTEMS
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    发明申请
    METHODS OF DETECTING STRESSES, METHODS OF TRAINING COMPACT MODELS, METHODS OF RELAXING STRESSES, AND COMPUTING SYSTEMS 有权
    检测应力的方法,训练紧凑型模型的方法,放松应力的方法和计算系统

    公开(公告)号:US20160012174A1

    公开(公告)日:2016-01-14

    申请号:US14688440

    申请日:2015-04-16

    IPC分类号: G06F17/50

    CPC分类号: G06F17/5081 G06F17/5009

    摘要: A method of detecting stress of an integrated circuit including first and second patterns formed from different materials may comprise: determining one or more stress detection points of the first pattern; dividing a region including a first stress detection point of the one or more stress detection points into a plurality of divided regions; calculating areas of the second pattern at the divided regions; and/or detecting a stress level applied to the first stress detection point of the first pattern by the second pattern based on the areas of the second pattern at the divided regions.

    摘要翻译: 检测包括由不同材料形成的第一和第二图案的集成电路的应力的方法可以包括:确定第一图案的一个或多个应力检测点; 将包含所述一个以上应力检测点的第一应力检测点的区域划分为多个分割区域; 计算分割区域的第二模式的面积; 和/或基于分割区域处的第二图案的区域来检测施加到第一图案的第一应力检测点的应力水平的第二图案。