METHOD OF FORMING PIEZOELECTRIC ACTUATOR OF INKJET HEAD
    2.
    发明申请
    METHOD OF FORMING PIEZOELECTRIC ACTUATOR OF INKJET HEAD 审中-公开
    喷嘴头压电致动器的形成方法

    公开(公告)号:US20090322829A1

    公开(公告)日:2009-12-31

    申请号:US12553511

    申请日:2009-09-03

    Abstract: A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.

    Abstract translation: 提供一种形成在振动板上的喷墨头的压电致动器的方法,以提供用于将油墨喷射到每个压力室的驱动力。 该方法包括在振动板上形成下电极,在下电极上形成压电层,位于每个压力室之上,形成覆盖下电极和压电层的保护层,暴露压电层的上表面 通过减小保护层和压电层的厚度,在压电层的上表面上形成上电极,除去保护层。 根据本发明,由于具有平坦的上表面的压电层形成均匀的图形,所以形成在其上的上电极的面积和厚度被均匀地控制。

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