METHOD OF FORMING PIEZOELECTRIC ACTUATOR OF INKJET HEAD
    1.
    发明申请
    METHOD OF FORMING PIEZOELECTRIC ACTUATOR OF INKJET HEAD 审中-公开
    喷嘴头压电致动器的形成方法

    公开(公告)号:US20090322829A1

    公开(公告)日:2009-12-31

    申请号:US12553511

    申请日:2009-09-03

    IPC分类号: B41J2/045

    摘要: A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.

    摘要翻译: 提供一种形成在振动板上的喷墨头的压电致动器的方法,以提供用于将油墨喷射到每个压力室的驱动力。 该方法包括在振动板上形成下电极,在下电极上形成压电层,位于每个压力室之上,形成覆盖下电极和压电层的保护层,暴露压电层的上表面 通过减小保护层和压电层的厚度,在压电层的上表面上形成上电极,除去保护层。 根据本发明,由于具有平坦的上表面的压电层形成均匀的图形,所以形成在其上的上电极的面积和厚度被均匀地控制。

    PIEZOELECTRIC INKJET PRINTHEAD
    2.
    发明申请
    PIEZOELECTRIC INKJET PRINTHEAD 失效
    压电式喷嘴

    公开(公告)号:US20100171797A1

    公开(公告)日:2010-07-08

    申请号:US12722664

    申请日:2010-03-12

    IPC分类号: B41J2/045

    CPC分类号: B41J2/14233 B41J2/055

    摘要: A piezoelectric inkjet printhead includes a manifold, a chamber array including a plurality of chambers in connection with the manifold and arranged along at least one side of the manifold, a vibrating plate to cover the plurality of chambers, and a plurality of piezoelectric actuators formed on the vibrating plate to change pressures of corresponding ones of the plurality of chambers by vibrating the vibrating plate. The plurality of chambers includes a plurality of pressure chambers disposed in a center portion of the chamber array and having corresponding ink ejecting nozzles, and at least two dummy chambers, one disposed on each side of the chamber array and having corresponding dummy nozzles that do not eject ink. A plurality of trenches may be formed in the vibrating plate between each of the piezoelectric actuators.

    摘要翻译: 压电喷墨打印头包括歧管,腔室阵列,其包括与歧管连接的多个腔室,并且沿着歧管的至少一侧布置,覆盖多个腔室的振动板,以及形成在 所述振动板通过振动所述振动板来改变所述多个室中相应的室的压力。 多个室包括设置在室阵列的中心部分并具有对应的喷墨喷嘴的多个压力室,以及至少两个虚设室,一个设置在室阵列的每一侧上,并且具有不对应的虚拟喷嘴 弹出墨水。 可以在每个压电致动器之间的振动板中形成多个沟槽。

    METHOD OF POLING PIEZOELECTRIC ACTUATOR
    3.
    发明申请
    METHOD OF POLING PIEZOELECTRIC ACTUATOR 审中-公开
    压电致动器的方法

    公开(公告)号:US20090015102A1

    公开(公告)日:2009-01-15

    申请号:US11936838

    申请日:2007-11-08

    IPC分类号: H01L41/09 H01L41/22

    摘要: A method of poling a piezoelectric actuator, which can improve the uniformity of a plurality of piezoelectric actuators. In the method, a plurality of piezoelectric actuators are prepared for poling. Then, at least two preliminary poling processes are performed on the prepared piezoelectric actuators under different preliminary voltages and displacements of the piezoelectric actuators subjected to each of the at least two poling processes are measured. A relationship between a voltage and a displacement for each of the piezoelectric actuators is established. Poling voltages are calculated so that the piezoelectric actuators can have the same target displacement. Formal poling is performed on the piezoelectric actuators under the calculated poling voltages. The displacements of the piezoelectric actuators, which have completed the formal poling, are measured.

    摘要翻译: 一种极化压电致动器的方法,其可以改善多个压电致动器的均匀性。 在该方法中,准备多个压电致动器用于极化。 然后,在不同的初始电压下对制备好的压电致动器进行至少两个初步极化处理,并且测量经受至少两个极化过程中的每一个的压电致动器的位移。 建立了每个压电致动器的电压和位移之间的关系。 计算极化电压,使得压电致动器可以具有相同的目标位移。 在计算出的极化电压下,对压电致动器进行正电极化。 测量完成正式极化的压电致动器的位移。