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公开(公告)号：US20120045300A1
公开(公告)日：2012-02-23
申请号：US13030926
申请日：2011-02-18
IPC分类号： H01L21/68
CPC分类号： H01L21/681 , Y10S414/136 , Y10S414/141
摘要： In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter.
摘要翻译： 根据所公开的实施例的示例性实施例，呈现基板对准器装置，衬底对准器装置具有框架，该框架适于允许衬底输送器将基板输送到对准器装置和从校准器装置输送基板，能够保持衬底的倒置卡盘 并且通过卡盘驱动轴可动地连接到所述框架，所述卡盘驱动轴接合到所述倒置的卡盘，用于相对于所述框架移动所述倒置的卡盘并实现所述基板的对准;位于所述卡盘和卡盘驱动轴之间的感测装置，用于检测所述基板的位置确定特征 以及可移动地连接到框架并且位于倒置卡盘下方的框架内部的基板传送机构，用于将基板从倒置卡盘移动到基板运送器。
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公开(公告)号：US08403619B2
公开(公告)日：2013-03-26
申请号：US13030926
申请日：2011-02-18
IPC分类号： H01L21/68
CPC分类号： H01L21/681 , Y10S414/136 , Y10S414/141
摘要： In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter.
摘要翻译： 根据所公开的实施例的示例性实施例，呈现基板对准器装置，衬底对准器装置具有框架，该框架适于允许衬底输送器将基板输送到对准器装置和从校准器装置输送基板，能够保持衬底的倒置卡盘 并且通过卡盘驱动轴可动地连接到所述框架，所述卡盘驱动轴接合到所述倒置的卡盘，用于相对于所述框架移动所述倒置的卡盘并实现所述基板的对准;位于所述卡盘和卡盘驱动轴之间的感测装置，用于检测所述基板的位置确定特征 以及可移动地连接到框架并且位于倒置卡盘下方的框架内部的基板传送机构，用于将基板从倒置卡盘移动到基板运送器。
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公开(公告)号：US07891936B2
公开(公告)日：2011-02-22
申请号：US11093479
申请日：2005-03-30
IPC分类号： H01L21/68
CPC分类号： H01L21/681 , Y10S414/136 , Y10S414/141
摘要： A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.
摘要翻译： 衬底对准器提供最小的衬底运送器延伸和缩回运动，以快速对准衬底而没有背面损伤，同时增加衬底处理的吞吐量。 在一个实施例中，对准器具有连接到框架的倒置卡盘，具有能够将基板从卡盘传送到运输工具而不旋转重新定位基板的基板输送系统。 倒置的卡盘消除了基板基准的对准器阻塞，并且与传送系统一起，允许运送器在对准期间保持在框架内。 在另一个实施例中，对准器具有连接到框架的可旋转传感器头和具有用于在对准期间支撑衬底的透明搁板的衬底支撑件，以便在对准期间运输器能够保持在框架内。 独立于支撑垫上的基准位置执行基板对准。 在其它实施例中，衬底支撑件采用缓冲系统来缓冲衬底内部的衬底，从而可快速地交换衬底。
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公开(公告)号：US20090243413A1
公开(公告)日：2009-10-01
申请号：US12163996
申请日：2008-06-27
申请人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
发明人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
CPC分类号： H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
摘要翻译： 一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子 其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子轴承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置为接合 所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平 转子轴承部分。
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公开(公告)号：US08283813B2
公开(公告)日：2012-10-09
申请号：US12163996
申请日：2008-06-27
申请人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
发明人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
IPC分类号： H02K7/09
CPC分类号： H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
摘要翻译： 一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子 其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子轴承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置为接合 所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平 转子轴承部分。
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6.发明授权公开(公告)号：US06567711B1
公开(公告)日：2003-05-20
申请号：US09649374
申请日：2000-08-28
申请人： Martin Hosek , Jairo Terra Moura , Hakan Elmali
发明人： Martin Hosek , Jairo Terra Moura , Hakan Elmali
IPC分类号： G05B1302
CPC分类号： G05B13/021
摘要： A system for extracting a signal component from an output signal of a dynamic system. The system comprises a state observer and a corrector filter. The state observer is adapted to track a signal component that represents dominant dynamics in the output signal of the dynamic system and provide an estimation signal representing an estimated signal component in the output signal of the dynamic system. The corrector filter is adapted to compensate for a mismatch between the estimation signal and the actual signal component that represents the dominant dynamics in the output signal. A combination of the estimation signal with an output signal of the corrector filter can provide a synthesized signal including the signal component that represents the dominant dynamics in the output signal.
摘要翻译： 一种用于从动态系统的输出信号中提取信号分量的系统。 该系统包括状态观察器和校正滤波器。 状态观察器适于跟踪表示动态系统的输出信号中的主要动力学的信号分量，并且提供表示动态系统的输出信号中的估计信号分量的估计信号。 校正滤波器适于补偿估计信号和表示输出信号中的主要动力学的实际信号分量之间的失配。 估计信号与校正滤波器的输出信号的组合可以提供包括表示输出信号中的主要动力学的信号分量的合成信号。
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公开(公告)号：US20090001907A1
公开(公告)日：2009-01-01
申请号：US11769688
申请日：2007-06-27
IPC分类号： H02P31/00
CPC分类号： F16C41/008 , F16C32/0493 , F16C2380/26 , H02P6/15 , H02P2209/07
摘要： A method of commutating a motor includes calculating an adjustment electrical angle, and utilizing the adjustment electrical angle in a common set of commutation equations so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor.
摘要翻译： 一种换向马达的方法包括计算调整电角度，并利用公共换向方程组中的调整电角度，使得公共换向方程组能够在马达中产生一维和二维力。
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公开(公告)号：US09752615B2
公开(公告)日：2017-09-05
申请号：US11769651
申请日：2007-06-27
IPC分类号： F16C32/04
CPC分类号： F16C32/0444 , F16C32/0493 , F16C2380/26
摘要： A method of commutating a motor includes operatively interfacing a stator and actuated component of the motor, arranging at least two winding sets relative to the actuated component, and independently controlling the at least two winding sets so that with the at least two winding sets the actuated component is both driven and centered.
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公开(公告)号：US08823294B2
公开(公告)日：2014-09-02
申请号：US11769688
申请日：2007-06-27
IPC分类号： H02P5/00
CPC分类号： F16C41/008 , F16C32/0493 , F16C2380/26 , H02P6/15 , H02P2209/07
摘要： A method of commutating a motor includes calculating an adjustment electrical angle, and utilizing the adjustment electrical angle in a common set of commutation equations so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor.
摘要翻译： 一种换向马达的方法包括计算调整电角度，并利用公共换向方程组中的调整电角度，使得公共换向方程组能够在马达中产生一维和二维力。
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公开(公告)号：US20090001917A1
公开(公告)日：2009-01-01
申请号：US11769651
申请日：2007-06-27
IPC分类号： H02P31/00
CPC分类号： F16C32/0444 , F16C32/0493 , F16C2380/26
摘要： A method of commutating a motor includes operatively interfacing a stator and actuated component of the motor, arranging at least two winding sets relative to the actuated component, and independently controlling the at least two winding sets so that with the at least two winding sets the actuated component is both driven and centered.
摘要翻译： 一种换向电动机的方法包括操作地连接电动机的定子和致动部件，相对于致动部件布置至少两个绕组，并且独立地控制至少两个绕组组，使得至少两个绕组组被致动 组件都被驱动和集中。
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