公开(公告)号：US4730976A

公开(公告)日：1988-03-15

申请号：US695899

申请日：1985-01-29

申请人： James C. Davis ,  Norman B. Brooks

发明人： James C. Davis ,  Norman B. Brooks

IPC分类号： H01L21/67 ,  H01L21/677 ,  B65G65/00

CPC分类号： H01L21/67766 ,  Y10S414/135 ,  Y10S414/137

摘要： In a material transfer device, an articulated arm assembly extends and retracts in a "froglike" motion to transfer an object between a plurality of locations. The articulated arm assembly is rotatable about a pivot point in a radial plane and can be raised or lowered in an axial direction.

摘要翻译： 在材料转移装置中，铰接臂组件以“青蛙状”运动延伸和缩回以在多个位置之间传送物体。 铰接臂组件可绕径向平面中的枢转点旋转并且可以沿轴向方向升高或降低。

公开(公告)号：US4141458A

公开(公告)日：1979-02-27

申请号：US799547

申请日：1977-05-23

申请人： Norman B. Brooks ,  Michael M. Olmstead

发明人： Norman B. Brooks ,  Michael M. Olmstead

IPC分类号： B65G49/07 ,  C23C14/56 ,  C30B35/00 ,  H01L21/677 ,  B65B21/02 ,  B65G1/06

CPC分类号： C23C14/56 ,  C30B35/005 ,  H01L21/67793 ,  Y10S414/137 ,  Y10S414/139

摘要： An article handling system especially adapted for transporting thin, fragile articles such as silicon wafers into and out of a sealed environment such as a vacuum chamber comprises a vibratory track for transporting articles to be processed, an article handler associated with the track for removing articles from the track for processing and returning them to the track thereafter, and a pair of loader/unloaders at opposite ends of the track for intermittently supplying articles to be processed to the track and removing them therefrom after processing.

摘要翻译： 特别适用于将诸如硅晶片的薄的脆弱物品输送进入诸如真空室的密封环境中的物品处理系统包括用于运送待处理物品的振动轨道，与轨道相关联的物品处理器，用于从 用于处理的轨道并将其返回到轨道，以及在轨道的相对端处的一对装载机/卸载器，用于将处理的物品间歇地供给到轨道并且在处理之后从其中将其移除。

公开(公告)号：US4030622A

公开(公告)日：1977-06-21

申请号：US580350

申请日：1975-05-23

申请人： Norman B. Brooks ,  Michael M. Olmstead

发明人： Norman B. Brooks ,  Michael M. Olmstead

IPC分类号： B65G49/07 ,  C23C14/56 ,  C30B35/00 ,  H01L21/677 ,  C23C13/08

CPC分类号： C23C14/56 ,  C30B35/005 ,  H01L21/67793 ,  Y10S414/137 ,  Y10S414/139

摘要： An article handling system especially adapted for transporting thin, fragile articles such as silicon wafers into and out of a sealed environment such as a vacuum chamber comprises a vibratory track for transporting articles to be processed, an article handler associated with the track for removing articles from the track for processing and returning them to the track thereafter, and a pair of loader/unloaders at opposite ends of the track for intermittently supplying articles to be processed to the track and removing them therefrom after processing.

摘要翻译： 特别适用于将诸如硅晶片的薄的脆弱物品输送进入诸如真空室的密封环境中的物品处理系统包括用于运送待处理物品的振动轨道，与轨道相关联的物品处理器，用于从 用于处理的轨道并将其返回到轨道，以及在轨道的相对端处的一对装载机/卸载器，用于将处理的物品间歇地供给到轨道并且在处理之后从其中将其移除。

公开(公告)号：US4275978A

公开(公告)日：1981-06-30

申请号：US12354

申请日：1979-02-15

申请人： Norman B. Brooks ,  Frank P. Brooks

发明人： Norman B. Brooks ,  Frank P. Brooks

IPC分类号： B65G25/02 ,  B65G27/08

CPC分类号： B65G25/02 ,  Y10S414/135

摘要： Compact, lightweight transport apparatus for use particularly in hostile environments employs a plurality of groups of rails flexurally mounted to a base and corresponding groups of slats flexurally mounted to the rails and forming a slat array. Corresponding groups of slats and rails are reciprocated out of phase so that the slat group orbits relative to the base along an orbital path. The different slat-rail groups are also reciprocated out of phase with one another so that an object placed on the slat array is advanced incrementally along the slat array in a very gentle fashion.

摘要翻译： 用于特别在恶劣环境中的紧凑且轻便的运输装置采用弯曲地安装到基座的多组轨道组和弯曲地安装到轨道上的相应的一组板条并形成板条阵列。 相应的板条和轨道组彼此相位往复运动，使得板条组沿着轨道路径相对于基部轨道运动。 不同的板条组彼此相异地往复运动，使得放置在板条阵列上的物体以非常柔和的方式沿着板条阵列递增地前进。