公开(公告)号：US20140069463A1

公开(公告)日：2014-03-13

申请号：US13606071

申请日：2012-09-07

申请人： James Coyne ,  Joseph D. Fernandez ,  William W. Harkins ,  Christos Theodore Kapogiannis

发明人： James Coyne ,  Joseph D. Fernandez ,  William W. Harkins ,  Christos Theodore Kapogiannis

IPC分类号： B08B7/04 ,  B25J11/00 ,  B25J19/02 ,  A47L5/14

CPC分类号： H01L21/6838 ,  H01L21/4807 ,  H01L21/67028

摘要： A system including a shuttle movable along a shuttle path, the shuttle being operable to support a sheet; a pick-up assembly including a yoke and a detection plate located above the shuttle path, the detection plate being freely supported by the yoke and movable in a vertical direction relative to the yoke with an upper limit and a lower limit defined by the yoke, wherein the yoke is operable to pick and place the sheet, and wherein the detection plate is used to detect the presence of a piece of debris on a surface of the sheet or a surface of the shuttle; and a cleaning device located adjacent to the pick-up assembly and above the shuttle path, wherein the cleaning device is operable to remove the piece of debris located on the surface of the sheet or the surface of the shuttle.

摘要翻译： 一种系统，包括可沿梭子轨道运动的往复运动件，梭子可操作以支撑片材; 一个拾取组件，包括位于往复轨道上方的磁轭和检测板，检测板由磁轭自由地支撑并且能够相对于磁轭在垂直方向上具有由磁轭限定的上限和下限， 其中所述轭可操作以拾取和放置所述片材，并且其中所述检测板用于检测片材表面或梭子表面上的碎片的存在; 以及位于所述拾取组件附近并在所述穿梭路径上方的清洁装置，其中所述清洁装置可操作以移除位于所述片材的表面上或所述梭的表面上的所述碎片。