PARTICLE DETECTION AND CLEANING SYSTEM
    1.
    发明申请
    PARTICLE DETECTION AND CLEANING SYSTEM 审中-公开
    颗粒检测和清洁系统

    公开(公告)号:US20140069463A1

    公开(公告)日:2014-03-13

    申请号:US13606071

    申请日:2012-09-07

    摘要: A system including a shuttle movable along a shuttle path, the shuttle being operable to support a sheet; a pick-up assembly including a yoke and a detection plate located above the shuttle path, the detection plate being freely supported by the yoke and movable in a vertical direction relative to the yoke with an upper limit and a lower limit defined by the yoke, wherein the yoke is operable to pick and place the sheet, and wherein the detection plate is used to detect the presence of a piece of debris on a surface of the sheet or a surface of the shuttle; and a cleaning device located adjacent to the pick-up assembly and above the shuttle path, wherein the cleaning device is operable to remove the piece of debris located on the surface of the sheet or the surface of the shuttle.

    摘要翻译: 一种系统,包括可沿梭子轨道运动的往复运动件,梭子可操作以支撑片材; 一个拾取组件,包括位于往复轨道上方的磁轭和检测板,检测板由磁轭自由地支撑并且能够相对于磁轭在垂直方向上具有由磁轭限定的上限和下限, 其中所述轭可操作以拾取和放置所述片材,并且其中所述检测板用于检测片材表面或梭子表面上的碎片的存在; 以及位于所述拾取组件附近并在所述穿梭路径上方的清洁装置,其中所述清洁装置可操作以移除位于所述片材的表面上或所述梭的表面上的所述碎片。

    Apparatus and method for removing semiconductor chips from a diced
semiconductor wafer
    4.
    发明授权
    Apparatus and method for removing semiconductor chips from a diced semiconductor wafer 失效
    从切割的半导体晶片去除半导体芯片的装置和方法

    公开(公告)号:US6139676A

    公开(公告)日:2000-10-31

    申请号:US911603

    申请日:1997-08-14

    IPC分类号: B32B38/10 H01L21/00 B32B35/00

    摘要: An apparatus and method is disclosed for removing a selected semiconductor chip from a semiconductor wafer. The selected semiconductor chip is elevated by the use of an X--Y--Z assembly by having a rounded tip portion of a round probe member assembly that is part of the X--Y--Z assembly contact a back portion of a flexible, transparent backing layer beneath the selected semiconductor chip so that removal of the semiconductor chip can be completed by using a vacuum type pencil.

    摘要翻译: 公开了一种用于从半导体晶片去除所选择的半导体芯片的装置和方法。 所选择的半导体芯片通过使用XYZ组件被升高,所述XYZ组件具有作为XYZ组件的一部分的圆形探针构件组件的圆形尖端部分接触所选择的半导体芯片之下的柔性透明背衬层的后部,使得 可以通过使用真空型铅笔来完成半导体芯片的去除。