Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation
    1.
    发明授权
    Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation 有权
    基于两级致动的微机电镜和电可编程衍射光栅

    公开(公告)号:US06967757B1

    公开(公告)日:2005-11-22

    申请号:US10722237

    申请日:2003-11-24

    IPC分类号: G02B26/08

    CPC分类号: G02B26/0841 G02B26/0808

    摘要: A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.

    摘要翻译: 公开了一种用于重定向入射光的微机电(MEM)装置。 MEM器件利用从不同堆叠和互连的多晶硅层彼此层叠形成的一对静电致动器来移动或倾斜上覆的反光板(即,反射镜),以提供入射光的反射分量,其可以偏移 同相或传播角度。 利用杠杆弯曲来为光反射板提供高达几微米的相对大的垂直位移的MEM装置具有用于形成电可编程衍射光栅(即,多色分光器)或微镜阵列的应用。

    Method and apparatus for actively controlling a micro-scale flexural plate wave device
    2.
    发明授权
    Method and apparatus for actively controlling a micro-scale flexural plate wave device 有权
    用于主动控制微尺度弯曲板波装置的方法和装置

    公开(公告)号:US06247905B1

    公开(公告)日:2001-06-19

    申请号:US09213202

    申请日:1998-12-17

    申请人: Jeffrey L. Dohner

    发明人: Jeffrey L. Dohner

    IPC分类号: F04B1700

    CPC分类号: F04B43/043 F04B43/12

    摘要: An actively controlled flexural plate wave device provides a micro-scale pump. A method of actively controlling a flexural plate wave device produces traveling waves in the device by coordinating the interaction of a magnetic field with actively controlled currents. An actively-controlled flexural plate wave device can be placed in a fluid channel and adapted for use as a micro-scale fluid pump to cool or drive micro-scale systems, for example, micro-chips, micro-electrical-mechanical devices, micro-fluid circuits, or micro-scale chemical analysis devices.

    摘要翻译: 主动控制的弯曲板波装置提供微型泵。 通过协调磁场与主动控制电流的相互作用,主动控制弯曲板波装置的方法在装置中产生行波。 主动控制的弯曲板波装置可以放置在流体通道中并适于用作微型流量泵以冷却或驱动微尺度系统,例如微型芯片,微机电装置,微型 流体回路或微尺度化学分析装置。

    On-line measurement of fluid mixtures
    3.
    发明授权
    On-line measurement of fluid mixtures 失效
    在线测量流体混合物

    公开(公告)号:US4509360A

    公开(公告)日:1985-04-09

    申请号:US508217

    申请日:1983-06-24

    摘要: An apparatus and method for measuring particle agglomeration or dispersion in fluid mixtures, such as polymer melts, resides in a piezoelectric transducer, a spherical fused quartz lens, and a fluid housing. A repetitive, broadband, ultrasonic wave is produced by the transducer and is sent into the lens, which also serves to isolate the transducer from the mixture. The ultrasonic wave meets a spherical dimple at the end of the lens which focuses a portion of it into a diffraction limited spot or "interrogation zone". Since the intensity of the wave is large in the interrogation zone, small changes in the impedance of the fluid in this zone, caused by passing agglomerates, will cause large fluctuations in the intensity of the back scattered wave, which is monitored by the transducer between pulses and displayed by associated electronic elements.

    摘要翻译: 用于测量流体混合物(例如聚合物熔体)中的颗粒聚集或分散的装置和方法驻留在压电换能器,球形熔融石英透镜和流体壳体中。 重复的,宽带的超声波由换能器产生并被送入透镜,其也用于将换能器与混合物隔离。 超声波在透镜的端部处遇到一个球形凹坑,将其一部分聚焦成衍射限制光斑或“询问区”。 由于询问区的波强大,该区域的流体阻抗的小变化是由聚集体引起的,会引起背散射波强度的大幅波动,这是由传感器监测的 脉冲并由相关联的电子元件显示。