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公开(公告)号：US09374887B1
公开(公告)日：2016-06-21
申请号：US13618997
申请日：2012-09-14
申请人： Larry K. Warne , Lorena I. Basilio , William L. Langston , William A. Johnson , Jon Ihlefeld , James C. Ginn, III , Paul G. Clem , Michael B. Sinclair
发明人： Larry K. Warne , Lorena I. Basilio , William L. Langston , William A. Johnson , Jon Ihlefeld , James C. Ginn, III , Paul G. Clem , Michael B. Sinclair
CPC分类号： H05K1/024 , G02B1/002 , H01P1/2005 , H01P7/10 , H01Q15/0086
摘要： Resonances can be tuned in dielectric resonators in order to construct single-resonator, negative-index metamaterials. For example, high-contrast inclusions in the form of metallic dipoles can be used to shift the first electric resonance down (in frequency) to the first magnetic resonance, or alternatively, air splits can be used to shift the first magnetic resonance up (in frequency) near the first electric resonance. Degenerate dielectric designs become especially useful in infrared- or visible-frequency applications where the resonator sizes associated with the lack of high-permittivity materials can become of sufficient size to enable propagation of higher-order lattice modes in the resulting medium.
摘要翻译： 谐振可以在介质谐振器中进行调谐，以构建单谐振器，负指数超材料。 例如，可以使用金属偶极子形式的高对比度夹杂物将第一电共振向下（频率）向下移动到第一磁共振，或者，可以使用空气分裂来使第一磁共振向上移动（在 频率）靠近第一次电共振。 退化电介质设计在红外或可见频率应用中变得特别有用，其中与缺少高介电常数材料相关联的谐振器尺寸可以变得足够的尺寸以使得能够在所得介质中传播高阶晶格模式。
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公开(公告)号：US07449699B1
公开(公告)日：2008-11-11
申请号：US11478573
申请日：2006-06-29
IPC分类号： G21K5/04
CPC分类号： H01J37/3056 , H01J37/228 , H01J37/304 , H01J2237/20235 , H01J2237/216 , H01J2237/2482 , H01J2237/30455
摘要： Methods and apparatus whereby an optical interferometer is utilized to monitor and provide feedback control to an integrated energetic particle column, to create desired topographies, including the depth, shape and/or roughness of features, at a surface of a specimen. Energetic particle columns can direct energetic species including, ions, photons and/or neutral particles to a surface to create features having in-plane dimensions on the order of 1 micron, and a height or depth on the order of 1 nanometer. Energetic processes can include subtractive processes such as sputtering, ablation, focused ion beam milling and, additive processes, such as energetic beam induced chemical vapor deposition. The integration of interferometric methods with processing by energetic species offers the ability to create desired topographies at surfaces, including planar and curved shapes.
摘要翻译： 使用光学干涉仪来监测并提供对集成的能量粒子柱的反馈控制的方法和装置，以在样本的表面上产生包括特征的深度，形状和/或粗糙度的期望的形貌。 能量粒子柱可以将能量物质（包括离子，光子和/或中性粒子）引导到表面以产生具有约1微米的面内尺寸以及约1纳米的高度或深度的特征。 能量过程可以包括减影过程，例如溅射，消融，聚焦离子束研磨，以及加成过程，例如能量束诱导化学气相沉积。 干涉测量方法与能量物质处理的集成提供了在表面（包括平面和弯曲形状）上创建所需拓扑的能力。
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公开(公告)号：US07034271B1
公开(公告)日：2006-04-25
申请号：US10857115
申请日：2004-05-27
CPC分类号： G02B21/0016 , G02B21/18
摘要： A full-field imaging, long working distance, incoherent interference microscope suitable for three-dimensional imaging and metrology of MEMS devices and test structures on a standard microelectronics probe station. A long working distance greater than 10 mm allows standard probes or probe cards to be used. This enables nanometer-scale 3-dimensional height profiles of MEMS test structures to be acquired across an entire wafer while being actively probed, and, optionally, through a transparent window. An optically identical pair of sample and reference arm objectives is not required, which reduces the overall system cost, and also the cost and time required to change sample magnifications. Using a LED source, high magnification (e.g., 50×) can be obtained having excellent image quality, straight fringes, and high fringe contrast.
摘要翻译： 全场成像，长工作距离，非相干干涉显微镜适用于标准微电子探针台上的MEMS器件和测试结构的三维成像和计量。 长度大于10 mm的工作距离允许使用标准探头或探针卡。 这使得能够在被积极探测的情况下以及可选地通过透明窗口的整个晶片上获取MEMS测试结构的纳米尺度的三维高度分布。 不需要光学上相同的一对样品和参考臂物镜，这降低了整体系统成本，以及改变样品放大率所需的成本和时间。 使用LED源，可以获得具有优异的图像质量，直条纹和高边缘对比度的高放大率（例如，50倍）。
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4.发明授权Method and system for automated on-chip material and structural certification of MEMS devices 有权MEMS器件自动化芯片材料和结构认证的方法和系统公开(公告)号：US06567715B1
公开(公告)日：2003-05-20
申请号：US09553989
申请日：2000-04-19
IPC分类号： G06F1900
CPC分类号： B81C99/005
摘要： A new approach toward MEMS quality control and materials characterization is provided by a combined test structure measurement and mechanical response modeling approach. Simple test structures are cofabricated with the MEMS devices being produced. These test structures are designed to isolate certain types of physical response, so that measurement of their behavior under applied stress can be easily interpreted as quality control and material properties information.
摘要翻译： 通过组合的测试结构测量和机械响应建模方法提供了MEMS质量控制和材料表征的新方法。 简单的测试结构与正在生产的MEMS器件共同构成。 这些测试结构设计用于隔离某些类型的物理响应，从而可以轻易地将其在施加的应力下的行为测量解释为质量控制和材料属性信息。
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5.发明授权公开(公告)号：US06967757B1
公开(公告)日：2005-11-22
申请号：US10722237
申请日：2003-11-24
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , G02B26/0808
摘要： A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.
摘要翻译： 公开了一种用于重定向入射光的微机电（MEM）装置。 MEM器件利用从不同堆叠和互连的多晶硅层彼此层叠形成的一对静电致动器来移动或倾斜上覆的反光板（即，反射镜），以提供入射光的反射分量，其可以偏移 同相或传播角度。 利用杠杆弯曲来为光反射板提供高达几微米的相对大的垂直位移的MEM装置具有用于形成电可编程衍射光栅（即，多色分光器）或微镜阵列的应用。
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公开(公告)号：US06721094B1
公开(公告)日：2004-04-13
申请号：US09800047
申请日：2001-03-05
IPC分类号： G02B2122
CPC分类号： G01B9/04 , G01B9/02082 , G02B21/14 , G02B21/22
摘要： Disclosed is a long working distance interference microscope suitable for three-dimensional imaging and metrology of MEMS devices and test structures on a standard microelectronics probe station. The long working distance of 10-30 mm allows standard probes or probe cards to be used. This enables nanometer-scale 3-D height profiles of MEMS test structures to be acquired across an entire wafer. A well-matched pair of reference/sample objectives is not required, significantly reducing the cost of this microscope, as compared to a Linnik microinterferometer.
摘要翻译： 公开了一种长工作距离干涉显微镜，适用于标准微电子探针台上的MEMS器件和测试结构的三维成像和计量。 10-30 mm的长工作距离允许使用标准探头或探针卡。 这使得能够在整个晶片上获取MEMS测试结构的纳米级3-D高度分布。 与Linnik微型干涉仪相比，不需要很好匹配的参考/样品目标对，显着降低了该显微镜的成本。
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7.发明授权Optical apparatus for forming correlation spectrometers and optical processors 失效用于形成相关光谱仪和光学处理器的光学装置
公开(公告)号：US5905571A
公开(公告)日：1999-05-18
申请号：US522202
申请日：1995-08-30
CPC分类号： G06E3/005 , G01J3/18 , G01J3/457 , G02B26/0808
摘要： Optical apparatus for forming correlation spectrometers and optical processors. The optical apparatus comprises one or more diffractive optical elements formed on a substrate for receiving light from a source and processing the incident light. The optical apparatus includes an addressing element for alternately addressing each diffractive optical element thereof to produce for one unit of time a first correlation with the incident light, and to produce for a different unit of time a second correlation with the incident light that is different from the first correlation. In preferred embodiments of the invention, the optical apparatus is in the form of a correlation spectrometer; and in other embodiments, the apparatus is in the form of an optical processor. In some embodiments, the optical apparatus comprises a plurality of diffractive optical elements on a common substrate for forming first and second gratings that alternately intercept the incident light for different units of time. In other embodiments, the optical apparatus includes an electrically-programmable diffraction grating that may be alternately switched between a plurality of grating states thereof for processing the incident light. The optical apparatus may be formed, at least in part, by a micromachining process.
摘要翻译： 用于形成相关光谱仪和光学处理器的光学装置。 光学装置包括形成在基板上的一个或多个衍射光学元件，用于接收来自光源的光并处理入射光。 光学装置包括用于交替地寻址其每个衍射光学元件的寻址元件，以产生与入射光的第一相关的一个单位时间，并且产生与不同于入射光的入射光的第二相关性。 第一相关。 在本发明的优选实施例中，光学装置是相关光谱仪的形式; 并且在其他实施例中，该装置是光学处理器的形式。 在一些实施例中，光学装置包括在公共基板上的多个衍射光学元件，用于形成用于不同单位时间交替地截取入射光的第一和第二光栅。 在其他实施例中，光学装置包括电可编程衍射光栅，其可以在其多个光栅状态之间交替地切换以处理入射光。 光学装置可以至少部分地通过微加工工艺形成。
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公开(公告)号：US5757536A
公开(公告)日：1998-05-26
申请号：US521559
申请日：1995-08-30
CPC分类号： G02B5/1828 , G02B26/0808
摘要： An electrically-programmable diffraction grating. The programmable grating includes a substrate having a plurality of electrodes formed thereon and a moveable grating element above each of the electrodes. The grating elements are electrostatically programmable to form a diffraction grating for diffracting an incident beam of light as it is reflected from the upper surfaces of the grating elements. The programmable diffraction grating, formed by a micromachining process, has applications for optical information processing (e.g. optical correlators and computers), for multiplexing and demultiplexing a plurality of light beams of different wavelengths (e.g. for optical fiber communications), and for forming spectrometers (e.g. correlation and scanning spectrometers).
摘要翻译： 电可编程衍射光栅。 可编程光栅包括其上形成有多个电极的基板和每个电极上方的可移动光栅元件。 光栅元件是静电可编程的，以形成衍射光栅，用于在入射光束从光栅元件的上表面反射时衍射入射光束。 通过微加工过程形成的可编程衍射光栅具有用于光学信息处理（例如光学相关器和计算机）的应用，用于对不同波长的多个光束（例如用于光纤通信）进行多路复用和解复用，并且用于形成光谱仪 例如相关和扫描光谱仪）。
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公开(公告)号：US07697134B1
公开(公告)日：2010-04-13
申请号：US11593386
申请日：2006-11-06
IPC分类号： G01J3/04
CPC分类号： G01J3/457 , G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01J2001/4242
摘要： A correlation spectrometer can detect a large number of gaseous compounds, or chemical species, with a species-specific mask wheel. In this mode, the spectrometer is optimized for the direct measurement of individual target compounds. Additionally, the spectrometer can measure the transmission spectrum from a given sample of gas. In this mode, infrared light is passed through a gas sample and the infrared transmission signature of the gasses present is recorded and measured using Hadamard encoding techniques. The spectrometer can detect the transmission or emission spectra in any system where multiple species are present in a generally known volume.
摘要翻译： 相关光谱仪可以用物种特异性掩模轮检测大量气态化合物或化学物质。 在这种模式下，光谱仪被优化用于直接测量单个目标化合物。 另外，光谱仪可以测量给定的气体样品的透射光谱。 在这种模式下，红外光通过气体样品，并使用Hadamard编码技术记录和测量气体的红外透射特征。 光谱仪可以检测在通常已知体积中存在多种物质的任何系统中的透射或发射光谱。
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10.发明授权Laser warning receiver to identify the wavelength and angle of arrival of incident laser light 有权激光警告接收器识别入射激光的波长和入射角公开(公告)号：US07683310B1
公开(公告)日：2010-03-23
申请号：US12108635
申请日：2008-04-24
CPC分类号： G01S7/4804
摘要： A laser warning receiver is disclosed which has up to hundreds of individual optical channels each optically oriented to receive laser light from a different angle of arrival. Each optical channel has an optical wedge to define the angle of arrival, and a lens to focus the laser light onto a multi-wavelength photodetector for that channel. Each multi-wavelength photodetector has a number of semiconductor layers which are located in a multi-dielectric stack that concentrates the laser light into one of the semiconductor layers according to wavelength. An electrical signal from the multi-wavelength photodetector can be processed to determine both the angle of arrival and the wavelength of the laser light.
摘要翻译： 公开了一种激光警告接收器，其具有多达数百个单独的光学通道，每个光学通道光学定向以从不同的到达角度接收激光。 每个光学通道具有用于限定到达角度的光学楔子，以及用于将激光聚焦到用于该通道的多波长光电探测器上的透镜。 每个多波长光电检测器具有多个半导体层，这些半导体层位于根据波长将激光聚集成半导体层之一的多电介质堆叠中。 可以处理来自多波长光电检测器的电信号以确定到达的角度和激光的波长。
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