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公开(公告)号：US20070089304A1
公开(公告)日：2007-04-26
申请号：US11243641
申请日：2005-10-05
Applicant: James Loomis , Richard Avidano
Inventor： James Loomis , Richard Avidano
CPC classification number: B43L13/00 , B28D1/225 , B28D5/0011 , H01L21/67092 , Y10T83/0333
Abstract: An automatically programmable tilting mechanism for holding a scribe tool at varying angles using an aerostatic bearing. The air bearing secures the scribe tool about its longitudinal shank and generally allows for free axial movement while the tool holding structure prevents rotation of the scribe tool, thus providing extremely fine compliance and force application of the scribe tool point against the substrate. During a scribing process, the tilting mechanism regularly adjusts the angle of the scribe tool relative to the substrate so that a fresh cutting edge is always being employed in the scribing process.
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公开(公告)号：US07302761B2
公开(公告)日：2007-12-04
申请号：US11243641
申请日：2005-10-05
Applicant: James W. Loomis , Richard Avidano
Inventor： James W. Loomis , Richard Avidano
CPC classification number: B43L13/00 , B28D1/225 , B28D5/0011 , H01L21/67092 , Y10T83/0333
Abstract: An automatically programmable tilting mechanism for holding a scribe tool at varying angles using an aerostatic bearing. The air bearing secures the scribe tool about its longitudinal shank and generally allows for free axial movement while the tool holding structure prevents rotation of the scribe tool, thus providing extremely fine compliance and force application of the scribe tool point against the substrate. During a scribing process, the tilting mechanism regularly adjusts the angle of the scribe tool relative to the substrate so that a fresh cutting edge is always being employed in the scribing process.
Abstract translation: 一种可自动编程的倾斜机构，用于使用空气静力轴承将切割工具保持在不同的角度。 空气轴承将划线工具围绕其纵向轴固定，并且通常允许自由轴向移动，同时工具保持结构防止划线工具的旋转，从而提供划线工具点对基板的非常精细的顺应性和力施加。 在划线过程中，倾斜机构规则地调节划线工具相对于基底的角度，使得在划线过程中始终采用新的切割边缘。
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