公开(公告)号：US20200288560A1

公开(公告)日：2020-09-10

申请号：US16652434

申请日：2018-11-22

Applicant: Japan Aerospace Exploration Agency

Inventor： Hitoshi KUNINAKA

IPC: H05H1/46 ,  H05H1/02

Abstract: In a microwave plasma source, a tubular magnet portion has a first opening end and a second opening end. The first opening end has a first polarity, and the second opening end has a second polarity. The tubular body is surrounded by the tubular magnet portion. A first magnetic circuit portion closes the first opening end. A second magnetic circuit portion is disposed opposite to the first magnetic circuit portion. The second magnetic circuit portion has a first opening part. An antenna penetrates the first magnetic circuit portion, is introduced to a space, and supplies microwave power to the space. The nozzle portion has a second opening part that has a smaller opening area than the first opening part and communicates with the first opening part. When an inner diameter of the tubular body is represented by a (mm), and a microwave cutoff wavelength of the microwave power being supplied to the space is represented by λ (mm), the microwave plasma source is configured to satisfy a relational expression λ>3.41×(a/2).

公开(公告)号：US20210257122A1

公开(公告)日：2021-08-19

申请号：US17269402

申请日：2019-08-21

Applicant: Japan Aerospace Exploration Agency

Inventor： Yoshitsugu SONE ,  Hitoshi KUNINAKA ,  Takeshi TAKASHIMA ,  Takashi WATANABE

IPC: G21H1/10 ,  B64G1/42

Abstract: A generator (100) of the present invention has a heat source (101) containing a radioisotope substance precursor that becomes a radioisotope substance by irradiation with a neutron and a controller (108) that controls the irradiation with the neutron.

公开(公告)号：US20200279722A1

公开(公告)日：2020-09-03

申请号：US16495123

申请日：2018-11-28

Applicant: KASUGA DENKI, INC. ,  Japan Aerospace Exploration Agency

Inventor： Nobuo NOMURA ,  Tomofumi MOGAMI ,  Kazuki MINEMURA ,  Daiki KODA ,  Takato MORISHITA ,  Satoshi HOSODA ,  Hitoshi KUNINAKA

IPC: H01J37/32 ,  H05H1/46

Abstract: A charge neutralizer that includes a vacuum chamber which is capable of having a charged object installed therein and includes a high vacuum processing unit that performs vapor deposition, and a plasma generator configured to supply plasma caused by an electron cyclotron resonance to an inside of the vacuum chamber. The plasma generator includes a plasma source configured to generate the plasma, and a flange configured to install the plasma source inside the vacuum chamber.