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公开(公告)号：US11910694B2
公开(公告)日：2024-02-20
申请号：US17200917
申请日：2021-03-15
Applicant: Japan Display Inc.
Inventor： Shigeki Terada
CPC classification number: H10K71/166 , C23C14/042 , C23C14/24 , H10K71/00 , H10K71/164
Abstract: A vapor deposition method for depositing evaporated materials on a substrate using a mask includes arranging a mask frame and correcting a deflection of the mask frame in the direction of gravity after the mask frame is placed. The mask frame faces the substrate so that a first side is higher than a second side in a direction of gravity. The mask frame is provided with a mask and has the first side and the second side facing each other.
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