Abstract:
System for the injection of a droplet aerosol containing a solute for the preparation of composite layers by pyrolysis of the solute on heated substrate (6) travelling in the muffle (2) of a furnace, characterized in that it comprises three parts, namely:an injection chamber (36) provided in its upper part with at least one opening for the supply of aerosol and additional air and in its lower part with a plate (54) having holes, each of which is provided with a short tubular element (56) in the manner of a vertical chimney stack; a chamber (38) for the vaporization of the droplets of the aerosol provided with a double side wall containing heating resistors (62, 64, 66) distributed over its entire height in several groups, each regulatable in an autonomous manner;a vapor phase discharge injector (40) in continuous form with the lower wall of the case and equipped with at least one slot (68) extending along a straight segment (70) in a direction perpendicular to the speed of travel of the substrate (6) to be coated.
Abstract:
The process, consisting of successively depositing upon one another the layers produced from chemical compounds, the first layer (2) being deposited on a substrate (3), is characterized in that each layer is deposited immediately after the preceding layer, and in that the depositions of the layers are performed by reactive chemical spraying and at temperatures determined by the compounds to be deposited, a chemically inert atmosphere being maintained between each deposition.