Apparatus and method for beam scanner

    公开(公告)号:US11449069B2

    公开(公告)日:2022-09-20

    申请号:US16685715

    申请日:2019-11-15

    申请人: Jeffrey A Albelo

    发明人: Jeffrey A Albelo

    IPC分类号: G05D1/02 G01S7/481 G01S17/931

    摘要: A beam scanner for use in conjunction with the operational guidance system of a vehicle. The beam scanner can be used as part of an electromagnetic signal transmit module or an electromagnetic signal receive module in either a transmissive or reflective mode. The beam scanner is a substantially transparent and partially conductive substrate plate having at least one generally planar face thereon with a series of particles affixed with said plate, each of said particles of an arbitrary size, and each of said particles possessing an induced dipole moment, and each of said particles in electrical contact with said partially conductive substrate plate.

    Apparatus and Method for Beam Scanner
    2.
    发明申请

    公开(公告)号:US20200081449A1

    公开(公告)日:2020-03-12

    申请号:US16685715

    申请日:2019-11-15

    申请人: Jeffrey A Albelo

    发明人: Jeffrey A Albelo

    IPC分类号: G05D1/02 G01S7/481

    摘要: A beam scanner for use in conjunction with the operational guidance system of a vehicle. The beam scanner can be used as part of an electromagnetic signal transmit module or an electromagnetic signal receive module in either a transmissive or reflective mode. The beam scanner is a substantially transparent and partially conductive substrate plate having at least one generally planar face thereon with a series of particles affixed with said plate, each of said particles of an arbitrary size, and each of said particles possessing an induced dipole moment, and each of said particles in electrical contact with said partially conductive substrate plate.

    Organic bottom antireflective coating for high performance mask making using optical imaging

    公开(公告)号:US06605394B2

    公开(公告)日:2003-08-12

    申请号:US09848859

    申请日:2001-05-03

    IPC分类号: G03F900

    CPC分类号: G03F1/46 G03F1/76 G03F7/091

    摘要: The disclosure pertains to a method of optically fabricating a photomask using a direct write continuous wave laser, comprising a series of steps including applying an organic antireflection coating over a chrome-containing layer; applying a chemically-amplified DUV photoresist over the organic antireflection coating; and exposing a surface of the DUV photoresist to the direct write continuous wave laser. The direct write continuous wave laser operates at a wavelength of 244 nm or 257 nm. In an alternative embodiment, the organic antireflection coating may be applied over an inorganic antireflection coating which overlies the chrome containing layer.