公开(公告)号：US20050269524A1

公开(公告)日：2005-12-08

申请号：US11130892

申请日：2005-05-17

申请人： Jeffrey Hastings ,  James Goodberlet ,  Feng Zhang ,  Henry Smith

发明人： Jeffrey Hastings ,  James Goodberlet ,  Feng Zhang ,  Henry Smith

IPC分类号： G01N21/00 ,  G01N23/00 ,  H01J37/08 ,  H01J37/317

CPC分类号： H01J37/3045 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/31761

摘要： A method or system of spatial-phase locking a beam used in maskless lithography provides a fiducial grid with a single spatial-period, the fiducial grid being rotated at an angle with respect to a direction of scanning the beam; detects a signal generated in response to the beam being incident upon the fiducial grid; determines frequency components of the detected signal; and determines a two-dimensional location of the beam from phases of two determined fundamental frequency component. The method or system further determines a size of the beam from relative amplitudes of the determined fundamental and harmonic frequency components and/or determine a shape of the beam from relative amplitudes of the determined fundamental and harmonic frequency components. The method or system corrects a deflection of the beam in response to the determined two-dimensional location, and/or adjusts the size of the beam in response to the determined size, and/or adjusts the shape of the beam in response to the determined shape. If the method or system spatial-phase locks a plurality of beams used in maskless lithography, a fiducial grid with a varying spatial-period is utilized. In the plural beam method or system, the frequency components for each beam are determined using frequency-division multiplexing.

摘要翻译： 在无掩模光刻中使用的光束的空间相位锁定的方法或系统提供具有单个空间周期的基准栅格，基准栅格相对于扫描光束的方向以一定角度旋转; 检测响应于入射到基准电网上的光束产生的信号; 确定检测信号的频率分量; 并且从两个确定的基本频率分量的相位确定波束的二维位置。 所述方法或系统还根据确定的基波和谐波频率分量的相对幅度确定波束的大小，和/或根据所确定的基波和谐波频率分量的相对幅度确定波束的形状。 所述方法或系统响应于所确定的二维位置校正波束的偏转，和/或响应于所确定的尺寸调整波束的尺寸，和/或响应于所确定的尺寸来调整波束的形状 形状。 如果方法或系统空间相位锁定在无掩模光刻中使用的多个光束，则利用具有变化的空间周期的基准网格。 在多波束方法或系统中，使用频分复用来确定每个波束的频率分量。