[DYNAMIC MASK MODULE]
    1.
    发明申请
    [DYNAMIC MASK MODULE] 审中-公开
    [动态掩模模块]

    公开(公告)号:US20050083498A1

    公开(公告)日:2005-04-21

    申请号:US10707628

    申请日:2003-12-25

    摘要: A dynamic mask module is disclosed, which comprises a micro-computer system, a mask pattern generator and a light source. The mask pattern generator is disposed over a substrate and electrically connected to the microcomputer system. The microcomputer system transmits an image signal to the mask pattern generator. The light source is disposed over the mask pattern generator to a photo-resist layer on the substrate. The mask pattern generated by the dynamic mask module is a dynamic image and the mask pattern can be changed on anytime. In addition, the manufacturing cost can be and the manufacturing time can be reduced.

    摘要翻译: 公开了一种动态掩模模块,其包括微计算机系统,掩模图案发生器和光源。 掩模图案发生器设置在基板上并电连接到微计算机系统。 微机系统将图像信号发送到掩模图案发生器。 光源设置在掩模图案发生器上面到基板上的光致抗蚀剂层。 由动态屏蔽模块生成的掩模图案是动态图像,可以随时改变掩模图案。 此外,制造成本可以降低制造时间。

    Method for generating dynamic mask pattern
    3.
    发明授权
    Method for generating dynamic mask pattern 有权
    生成动态掩模图案的方法

    公开(公告)号:US07320946B2

    公开(公告)日:2008-01-22

    申请号:US11160921

    申请日:2005-07-15

    IPC分类号: H01L21/30 G03F9/00

    摘要: A dynamic mask module is disclosed, which comprises a microcomputer system, a mask pattern generator and a light source. The mask pattern generator is disposed over a substrate and electrically connected to the microcomputer system. The microcomputer system transmits an image signal to the mask pattern generator. The light source is disposed over the mask pattern generator to a photo-resist layer on the substrate. The mask pattern generated by the dynamic mask module is a dynamic image and the mask pattern can be changed on anytime. In addition, the manufacturing cost can be and the manufacturing time can be reduced.

    摘要翻译: 公开了一种动态掩模模块,其包括微机系统,掩模图案发生器和光源。 掩模图案发生器设置在基板上并电连接到微计算机系统。 微机系统将图像信号发送到掩模图案发生器。 光源设置在掩模图案发生器上面到基板上的光致抗蚀剂层。 由动态屏蔽模块生成的掩模图案是动态图像,可以随时改变掩模图案。 此外,制造成本可以降低制造时间。

    DYNAMIC MASK MODULE
    4.
    发明申请
    DYNAMIC MASK MODULE 审中-公开
    动态掩模模块

    公开(公告)号:US20050244757A1

    公开(公告)日:2005-11-03

    申请号:US11160880

    申请日:2005-07-14

    摘要: A dynamic mask module is disclosed, which comprises a microcomputer system, a mask pattern generator and a light source. The mask pattern generator is disposed over a substrate and electrically connected to the microcomputer system. The microcomputer system transmits an image signal to the mask pattern generator. The light source is disposed over the mask pattern generator to a photo-resist layer on the substrate. The mask pattern generated by the dynamic mask module is a dynamic image and the mask pattern can be changed on anytime. In addition, the manufacturing cost can be and the manufacturing time can be reduced.

    摘要翻译: 公开了一种动态掩模模块,其包括微机系统,掩模图案发生器和光源。 掩模图案发生器设置在基板上并电连接到微计算机系统。 微机系统将图像信号发送到掩模图案发生器。 光源设置在掩模图案发生器上面到基板上的光致抗蚀剂层。 由动态屏蔽模块生成的掩模图案是动态图像,可以随时改变掩模图案。 此外,制造成本可以降低制造时间。