公开(公告)号：US20240331970A1

公开(公告)日：2024-10-03

申请号：US18444862

申请日：2024-02-19

Applicant: Jeol Ltd.

Inventor： Jun Watanabe ,  Tatsuhito Kimura ,  Tomohisa Fukuda ,  Tsutomu Negishi

IPC: H01J37/20 ,  G01N1/44

CPC classification number: H01J37/20 ,  G01N1/44 ,  H01J2237/2001 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20257 ,  H01J2237/20278

Abstract: A sample holder used for a sample processing apparatus that applies a charged particle beam to a sample to process the sample. The sample holder includes a holder base thermally connected to a cooling source, a rotating body rotatably supported on the holder base to hold the sample, and a drive unit that rotates the rotating body. The rotating body has a sliding surface that comes into slidable surface contact with the holder base.