公开(公告)号：US5241040A

公开(公告)日：1993-08-31

申请号：US551716

申请日：1990-07-11

申请人： Jerome J. Cuomo ,  Jeffrey D. Gelorme ,  Michael Hatzakis, Jr. ,  David A. Lewis ,  Jane M. Shaw ,  Stanley J. Whitehair

发明人： Jerome J. Cuomo ,  Jeffrey D. Gelorme ,  Michael Hatzakis, Jr. ,  David A. Lewis ,  Jane M. Shaw ,  Stanley J. Whitehair

IPC分类号： B01J19/12 ,  C08G73/10 ,  G01N22/00 ,  H01L21/312 ,  H05B6/68 ,  H05B6/80 ,  H05K1/03 ,  H05K3/46

CPC分类号： H05B6/705 ,  B01J19/126 ,  C08G73/1025 ,  G01N22/00 ,  H05B6/68 ,  B01J2219/00191 ,  B01J2219/1215 ,  H05K1/0346 ,  H05K3/4644 ,  Y02B40/143 ,  Y10T428/31681 ,  Y10T428/31721

摘要： A method and apparatus are disclosed for conducting a physical process and a chemical reaction by exposing a material containing a volatile substance to microwave radiation where the morphology of said material will change when exposed to such radiation. The power of said radiation is adjusted over time as the morphology of the material changes to maximize the effect of the radiation in order to produce a product in a minimum amount of time that is substantially free of said volatile substance.The method and apparatus can also be used to conduct such a process or reaction with materials that do not contain a volatile material.In one embodiment a method and apparatus are disclosed for manufacturing a polyimide from a precursor in a solvent by exposing the precursor to microwave radiation in a tuneable microwave resonant cavity that is tuned during imidization to achieve critical coupling of the system. Microwave power is controlled to remove the solvent and obtain the desired level of reaction. Processing time has been reduced thirty fold as compared to conventional thermal methods.

公开(公告)号：US5340914A

公开(公告)日：1994-08-23

申请号：US78732

申请日：1993-06-16

申请人： Jerome J. Cuomo ,  Jeffrey D. Gelorme ,  Michael Hatzakis, Jr. ,  David A. Lewis ,  Jane M. Shaw ,  Stanley J. Whitehair

发明人： Jerome J. Cuomo ,  Jeffrey D. Gelorme ,  Michael Hatzakis, Jr. ,  David A. Lewis ,  Jane M. Shaw ,  Stanley J. Whitehair

IPC分类号： B01J19/12 ,  C08G73/10 ,  G01N22/00 ,  H01L21/312 ,  H05B6/68 ,  H05B6/80 ,  H05K1/03 ,  H05K3/46 ,  C08F2/46 ,  C08G69/26

CPC分类号： H05B6/705 ,  B01J19/126 ,  C08G73/1025 ,  G01N22/00 ,  H05B6/68 ,  B01J2219/00191 ,  B01J2219/1215 ,  H05K1/0346 ,  H05K3/4644 ,  Y02B40/143 ,  Y10T428/31681 ,  Y10T428/31721

摘要： A method and apparatus are disclosed for conducting a physical process and a chemical reaction by exposing a material containing a volatile substance to microwave radiation where the morphology of said material will change when exposed to such radiation. The power of said radiation is adjusted over time as the morphology of the material changes to maximize the effect of the radiation in order to produce a product in a minimum amount of time that is substantially free of said volatile substance.The method and apparatus can also be used to conduct such a process or reaction with materials that do not contain a volatile material.In one embodiment a method and apparatus are disclosed for manufacturing a polyimide from a precursor in a solvent by exposing the precursor to microwave radiation in a tuneable microwave resonant cavity that is tuned during imidization to achieve critical coupling of the system. Microwave power is controlled to remove the solvent and obtain the desired level of reaction. Processing time has been reduced thirty fold as compared to conventional thermal methods.

公开(公告)号：US5837978A

公开(公告)日：1998-11-17

申请号：US770213

申请日：1996-12-19

申请人： Michael Hatzakis, Jr. ,  David Andrew Lewis ,  Jane Margaret Shaw

发明人： Michael Hatzakis, Jr. ,  David Andrew Lewis ,  Jane Margaret Shaw

IPC分类号： B01J19/12 ,  G01N22/00 ,  H05B6/68 ,  H05B6/80 ,  H05K1/03 ,  H05K3/46 ,  H05B6/66

CPC分类号： H05B6/705 ,  B01J19/126 ,  G01N22/00 ,  H05B6/68 ,  B01J2219/00191 ,  B01J2219/1215 ,  H05K1/0346 ,  H05K3/4644 ,  Y02B40/143

摘要： A control system for a blind microwave radiation tool a workpiece is described. The controlled system automatically tunes the cavity containing the workpiece. The control system automatically controls the temperature of the workpiece according to a predetermined temperature versus time schedule. Control system automatically determines when the workpiece has reached a particular predetermined physical condition. To achieve these results the control system automatically monitors applied power, reflected power or current temperature and automatically controls the microwave antennae location and the cavity short location in order to maintain the cavity in resonance and to determine when to exit without operator intervention. Control system can run on a small computer and is useful for automatically curing polyamic acid to polyimide to a predetermined percent cure automatically without operator intervention.

摘要翻译： 描述了用于盲微波辐射工具的工件的控制系统。 受控系统自动调谐包含工件的腔体。 控制系统根据预定的温度对时间表自动控制工件的温度。 控制系统自动确定工件何时达到特定的预定物理状态。 为了实现这些结果，控制系统自动监视所施加的功率，反射功率或当前温度，并自动控制微波天线位置和空腔短位置，以便保持谐振腔，并确定何时在没有操作员干预的情况下退出。 控制系统可以在小型计算机上运行，​​并且可用于自动将聚酰胺酸聚酰亚胺固化至预定百分比固化，无需操作员干预。