公开(公告)号：US20140043619A1

公开(公告)日：2014-02-13

申请号：US13569413

申请日：2012-08-08

申请人： Jiangwen DENG ,  Zhuanyun ZHANG ,  Fang Han CHEN ,  Wui Fung SZE

发明人： Jiangwen DENG ,  Zhuanyun ZHANG ,  Fang Han CHEN ,  Wui Fung SZE

IPC分类号： G01B11/24

CPC分类号： G01B11/24 ,  G01B2210/50

摘要： A chromatic confocal scanning apparatus comprises a light source for producing light rays comprising a plurality of wavelengths, a first screen having an open elongated slit which allows a strip of light rays produced from the light source to pass through the slit and a cylindrical objective lens both to converge the light rays onto an object surface that is to be measured, and to image light rays reflected from the object surface. An intermediate cylindrical lens set converges a strip of light rays imaged from the cylindrical objective lens to pass through an open elongated slit comprised in a second screen, and a color sensor receives light rays which have passed through the slit of the second screen for determining a plurality of wavelengths of the said strip of light rays, to thereby construct a height profile of at least a portion of the object surface.

摘要翻译： 彩色共焦扫描装置包括用于产生包括多个波长的光线的光源，具有开口细长狭缝的第一屏幕，其允许从光源产生的光束穿过狭缝和圆柱形物镜两者 以将光线会聚到要测量的物体表面上，并且对从物体表面反射的光线进行成像。 中间圆柱形透镜组会聚从圆柱形物镜成像的光线条，以穿过包含在第二屏幕中的开放细长狭缝，并且彩色传感器接收穿过第二屏幕的狭缝的光线，以确定 所述光线条的多个波长，从而构成物体表面的至少一部分的高度分布。

公开(公告)号：US20120307259A1

公开(公告)日：2012-12-06

申请号：US13151436

申请日：2011-06-02

申请人： Wing Hong LEUNG ,  Jiangwen DENG ,  Zhuanyun ZHANG

发明人： Wing Hong LEUNG ,  Jiangwen DENG ,  Zhuanyun ZHANG

IPC分类号： G01B11/24

CPC分类号： G01B11/0608

摘要： An apparatus for measuring a height of an object plane or multiple points on an object is disclosed. The apparatus comprises an imaging system having a focal plane passing through a focal point of the imaging system, wherein the focal plane of the imaging system is tilted at an oblique angle with respect to the object plane such that only a small portion of the object is in focus. Alternatively, the focal plane is tilted at an oblique angle with respect to a scanning direction of the imaging system during relative movement between the imaging system and the object.

摘要翻译： 公开了一种用于测量物体的高度或物体上的多个点的装置。 该装置包括具有通过成像系统的焦点的焦平面的成像系统，其中成像系统的焦平面相对于物平面倾斜倾斜，使得只有一小部分物体是 焦点。 或者，在成像系统和物体之间的相对运动期间，焦平面相对于成像系统的扫描方向以倾斜角倾斜。

公开(公告)号：US20110233178A1

公开(公告)日：2011-09-29

申请号：US12748578

申请日：2010-03-29

申请人： Chi Wah CHENG ,  Lap Kei CHOW ,  Zhuanyun ZHANG ,  Sze Leong LAI

发明人： Chi Wah CHENG ,  Lap Kei CHOW ,  Zhuanyun ZHANG ,  Sze Leong LAI

IPC分类号： B23K26/00

CPC分类号： B23K26/0673 ,  B23K26/364 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50 ,  B23K2103/52 ,  H01L21/67092

摘要： A laser processing apparatus for cutting substrates comprises a laser head for generating a laser beam and first and second work holders on which substrates are mountable. A diverter positioned along a path of the laser beam is operative to selectively direct the laser beam towards a first substrate mounted on the first work holder to cut the first substrate, or towards a second substrate mounted on the second work holder to cut the second substrate, so that contemporaneous operations may be conducted on one substrate while the other substrate is being cut.

摘要翻译： 用于切割基板的激光加工设备包括用于产生激光束的激光头和可安装基板的第一和第二工件保持器。 沿着激光束的路径定位的分流器可操作以选择性地将激光束引向安装在第一工件保持器上的第一基板，以切割第一基板，或朝向安装在第二工件保持器上的第二基板切割第二基板 从而可以在一个基板上同时进行操作，而另一个基板被切割。

公开(公告)号：US20130021464A1

公开(公告)日：2013-01-24

申请号：US13184698

申请日：2011-07-18

申请人： Zhuanyun ZHANG ,  Ran Shi WANG

发明人： Zhuanyun ZHANG ,  Ran Shi WANG

IPC分类号： H04N7/18

CPC分类号： G01N21/956 ,  G01B11/2513

摘要： An apparatus for inspection of a surface of a device comprises a projection module operative to project a pattern along a projection axis of the projection module onto the device. An imaging module receives an image of the pattern reflected from the device along an imaging axis of the imaging module onto an image sensor. A lens comprised in the imaging module has a first magnification in a first direction orthogonal to the imaging axis and a second magnification different from the first magnification in a second direction orthogonal to both the first direction and the imaging axis, which produces different fields of view of the image sensor and resolutions of the image in the first and second directions.

摘要翻译： 用于检查装置表面的装置包括投影模块，其可操作以沿着投影模块的投影轴将图案投影到装置上。 成像模块沿着成像模块的成像轴将从装置反射的图案的图像接收到图像传感器上。 包括在成像模块中的透镜在垂直于成像轴的第一方向上具有第一倍率，并且在与第一方向和成像轴正交的第二方向上具有与第一放大率不同的第二放大率，其产生不同的视场 的图像传感器和图像在第一和第二方向上的分辨率。