SYSTEM AND METHOD OF GENERATING GEOMETRY OF A SWEPT VOLUME OF A SPUN TOOL
    1.
    发明申请
    SYSTEM AND METHOD OF GENERATING GEOMETRY OF A SWEPT VOLUME OF A SPUN TOOL 审中-公开
    系统和方法生成一个SPUN工具的开关量的几何

    公开(公告)号:US20140316751A1

    公开(公告)日:2014-10-23

    申请号:US13864745

    申请日:2013-04-17

    IPC分类号: G06F17/50

    摘要: A method includes receiving a representation of a spun tool and receiving a path for the spun tool. The method also includes calculating a profile of the spun tool and simulating movement of the spun tool over the path. The method includes determining critical positions along the path at which the composition of the profile of the spun tool changes based on the path, and re-calculating the composition of the profile of the spun tool for each side of a critical position. The method further includes re-calculating the shape of the profile of the spun tool at non-critical positions of the path. The method further includes determining a volume defined by moving the spun tool along the path between a first critical position and a second critical position, changing the profile of the spun tool at each critical position, and calculating a total volume based on the path.

    摘要翻译: 一种方法包括接收纺丝工具的表示并接收纺丝工具的路径。 该方法还包括计算纺丝工具的轮廓并模拟纺丝工具在路径上的运动。 该方法包括确定沿着路径的临界位置,在该路径处,基于路径的纺纱机的轮廓的组成发生变化,并且重新计算关键位置的每一侧的纺丝工具的轮廓的组成。 该方法还包括在路径的非关键位置处重新计算纺丝工具的轮廓的形状。 该方法还包括确定通过沿着第一临界位置和第二临界位置之间的路径移动纺丝工具来限定的体积,改变在每个临界位置处的纺丝工具的轮廓,以及基于路径计算总体积。

    Slurry for chemical-mechanical planarization of sapphire and method for manufacturing the same
    3.
    发明授权
    Slurry for chemical-mechanical planarization of sapphire and method for manufacturing the same 有权
    用于蓝宝石化学机械平面化的浆料及其制造方法

    公开(公告)号:US07883557B2

    公开(公告)日:2011-02-08

    申请号:US11753224

    申请日:2007-05-24

    IPC分类号: B24D3/02 C09C1/68 C09K3/14

    CPC分类号: C09K3/1463 C09G1/02

    摘要: Taught herein is an aqueous chemical-mechanical polishing slurry, a method for manufacturing the same, and a method for using the same in the preparation of high precision finishing of a sapphire surface. The slurry comprises a chelating agent having 13 chelate rings, a strong propensity for complexation with aluminum ions and for forming a water-soluble chelate product. The removal rate can reach 10-16 μm/h, and the roughness can be reduced to 0.1 nm. The slurry components and their weight percentages are as follows: silica sol from about 1 wt. % to about 90 wt. %, alkali modifier from about 0.25 wt. % to about 5 wt. %, ether-alcohol activator from 0.5 wt. % to about 10 wt. %, chelating agent from about 1.25 wt. % to about 15 wt. %, and deionized water. Using such a slurry, high precision finishing of a sapphire surface can be achieved under relevant polishing conditions, which can satisfy the finishing requirements for industrial sapphire substrate. The slurry has the advantages of low cost, low roughness, and high removal rates, and it does not pollute the environment or damage the etching equipment.

    摘要翻译: 本发明是一种水性化学机械抛光浆料,其制造方法,以及用于制备蓝宝石表面的高精度精加工的方法。 浆料包含具有13个螯合环的螯合剂,与铝离子络合的强烈倾向并形成水溶性螯合物。 去除率可以达到10-16μm/ h,粗糙度可以降低到0.1nm。 浆料组分及其重量百分比如下:硅溶胶约1重量% %至约90wt。 %,碱改性剂约0.25wt。 %至约5wt。 %,乙醚 - 醇活化剂0.5重量% %至约10wt。 %,螯合剂约1.25wt。 %至约15wt。 %和去离子水。 使用这样的浆料,可以在相关的抛光条件下实现蓝宝石表面的高精度精加工,这可以满足工业蓝宝石衬底的精加工要求。 该浆料具有成本低,粗糙度低,去除率高的优点,不会污染环境或损坏蚀刻设备。